Researches on uniformity of diamond-like carbon films deposited on inner surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation and deposition

2015 ◽  
Vol 280 ◽  
pp. 81-85 ◽  
Author(s):  
Y. Xu ◽  
L.H. Li ◽  
J. Luo ◽  
K. Jing ◽  
J.Q. Zhao
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Discharge Plasma ◽  
Glass Tube ◽  
Carbon Films ◽  
Glow Discharge Plasma ◽  
Diamond Like Carbon ◽  
Inner Surface ◽  
Plasma Immersion Ion Implantation ◽  
Quartz Glass Tube

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

2009 ◽  
Vol 95 (6) ◽  
pp. 061503 ◽  
Author(s):  
Qiu Yuan Lu ◽  
Liu He Li ◽  
Jian Hui Li ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Impact Energy ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Dose Uniformity ◽  
Plasma Immersion Ion Implantation
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