Study of (Ti,Zr)C:H/a-C:H nanocomposite thin film formation by low temperature reactive high power impulse magnetron sputtering

2020 ◽  
Vol 398 ◽  
pp. 125958 ◽  
Author(s):  
Christian Poltorak ◽  
Michael Stüber ◽  
Harald Leiste ◽  
Andreas Bergmaier ◽  
Sven Ulrich
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
High Power ◽  
Film Formation ◽  
Nanocomposite Thin Film ◽  
Thin Film Formation

Titanium monoxide and titanium dioxide thin film formation by magnetron sputtering and its thermodynamic model

2021 ◽  
Vol 39 (5) ◽  
pp. 053403
Author(s):  
Sergey V. Bulyarskiy ◽  
Daria A. Koiva ◽  
Vladislav S. Belov ◽  
Elena V. Zenova ◽  
Grigory А. Rudakov ◽  
...  
Keyword(s):  
Thin Film ◽  
Titanium Dioxide ◽  
Magnetron Sputtering ◽  
Thermodynamic Model ◽  
Film Formation ◽  
Titanium Monoxide ◽  
Thin Film Formation

Investigation of CuInS2 Thin Film Formation by a Low-Temperature Chemical Deposition Method

2011 ◽  
Vol 4 (1) ◽  
pp. 382-390 ◽  
Author(s):  
Achim Fischereder ◽  
Thomas Rath ◽  
Wernfried Haas ◽  
Heinz Amenitsch ◽  
Dorith Schenk ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Film Formation ◽  
Chemical Deposition ◽  
Deposition Method ◽  
Chemical Deposition Method ◽  
Thin Film Formation ◽  
Cuins2 Thin Film

ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering

2021 ◽  
pp. 127029
Author(s):  
Niklas Bönninghoff ◽  
Wahyu Diyatmika ◽  
Jinn P. Chu ◽  
Stanislav Mráz ◽  
Jochen M. Schneider ◽  
...  
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Direct Current Magnetron Sputtering
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