ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127029 ◽

2021 ◽

pp. 127029

Author(s):

Niklas Bönninghoff ◽

Wahyu Diyatmika ◽

Jinn P. Chu ◽

Stanislav Mráz ◽

Jochen M. Schneider ◽

...

Keyword(s):

Thin Film ◽

Metallic Glass ◽

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering

Download Full-text

Prediction of amorphous phase formation by thermodynamic and kinetic analysis, a Fe-based thin film metallic glass deposited by direct current magnetron sputtering

Materials Research Express ◽

10.1088/2053-1591/ab2bc4 ◽

2019 ◽

Vol 6 (9) ◽

pp. 096407 ◽

Author(s):

Ali Obeydavi ◽

Ahmad Rezaeian ◽

Ali Shafyei ◽

Parviz Kameli ◽

Jyh-Wei Lee

Keyword(s):

Thin Film ◽

Metallic Glass ◽

Magnetron Sputtering ◽

Kinetic Analysis ◽

Amorphous Phase ◽

Phase Formation ◽

Direct Current ◽

Direct Current Magnetron Sputtering ◽

Amorphous Phase Formation

Download Full-text

A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CNx thin film growth with different inert gases

Diamond and Related Materials ◽

10.1016/j.diamond.2016.01.009 ◽

2016 ◽

Vol 64 ◽

pp. 13-26 ◽

Author(s):

Susann Schmidt ◽

Zsolt Czigány ◽

Jonas Wissting ◽

Grzegorz Greczynski ◽

Erik Janzén ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Comparative Study ◽

Direct Current ◽

Film Growth ◽

Thin Film Growth ◽

Inert Gases ◽

Direct Current Magnetron Sputtering

Download Full-text

Synthesis and Characterization of Molybdenum Back Contact Using Direct Current-Magnetron Sputtering for Thin Film Solar Cells

Frontiers in Materials ◽

10.3389/fmats.2018.00013 ◽

2018 ◽

Vol 5 ◽

Author(s):

Subhash M. Pandharkar ◽

Sachin R. Rondiya ◽

Avinash V. Rokade ◽

Bharat B. Gabhale ◽

Habib M. Pathan ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Direct Current ◽

Thin Film Solar Cells ◽

Synthesis And Characterization ◽

Back Contact ◽

Direct Current Magnetron Sputtering

Download Full-text

A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering

Applied Energy ◽

10.1016/j.apenergy.2018.07.001 ◽

2018 ◽

Vol 228 ◽

pp. 881-890 ◽

Author(s):

Xianming He ◽

Quan Wen ◽

Zhuang Lu ◽

Zhengguo Shang ◽

Zhiyu Wen

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Direct Current ◽

Energy Harvester ◽

Vibration Energy ◽

Vibration Energy Harvester ◽

Direct Current Magnetron Sputtering ◽

Piezoelectric Thin Film ◽

Pulsed Direct Current

Download Full-text

Low resistivity Ru1-xTixO2 thin films deposited by hybrid high-power impulse magnetron sputtering and direct current magnetron sputtering technique

Thin Solid Films ◽

10.1016/j.tsf.2019.03.005 ◽

2019 ◽

Vol 676 ◽

pp. 54-59 ◽

Author(s):

C.S. Sandu ◽

A. Magrez ◽

A. Karimi ◽

R. Sanjinés

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Low Resistivity ◽

Direct Current Magnetron Sputtering

Download Full-text

Low‐Temperature Deposition of Highly Textured Aluminum Nitride by Direct Current Magnetron Sputtering for Applications in Thin‐Film Resonators

Journal of The Electrochemical Society ◽

10.1149/1.1391664 ◽

1999 ◽

Vol 146 (2) ◽

pp. 691-696 ◽

Author(s):

R. S. Naik ◽

R. Reif ◽

J. J. Lutsky ◽

C. G. Sodini

Keyword(s):

Thin Film ◽

Low Temperature ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Direct Current ◽

Low Temperature Deposition ◽

Direct Current Magnetron Sputtering ◽

Temperature Deposition ◽

Thin Film Resonators

Download Full-text

Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2

Journal of Applied Physics ◽

10.1063/1.4733692 ◽

2012 ◽

Vol 112 (1) ◽

pp. 013305 ◽

Author(s):

S. Schmidt ◽

Zs. Czigány ◽

G. Greczynski ◽

J. Jensen ◽

L. Hultman

Keyword(s):

Mass Spectrometry ◽

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering ◽

Ion Mass Spectrometry

Download Full-text

Reactive sputtering of δ-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4882859 ◽

2014 ◽

Vol 32 (4) ◽

pp. 041510 ◽

Author(s):

Hans Högberg ◽

Lina Tengdelius ◽

Mattias Samuelsson ◽

Fredrik Eriksson ◽

Esteban Broitman ◽

...

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Reactive Sputtering ◽

Direct Current Magnetron Sputtering

Download Full-text

The synthesis and magnetoresistance behavior of direct current magnetron sputtering thin film of La0.7Pb0.3MnO3-δ

Materials Research Bulletin ◽

10.1016/s0025-5408(01)00554-2 ◽

2001 ◽

Vol 36 (3-4) ◽

pp. 673-681 ◽

Author(s):

H.Q Li ◽

Q.F Fang ◽

Z.G Zhu ◽

C.S Xiong

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering

Download Full-text

Ti/NiCu/Ag and Al/NiCu/Ag thin film deposited on positive temperature coefficient (PTC) thermistor by direct current magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-011-0407-9 ◽

2011 ◽

Vol 23 (1) ◽

pp. 290-294 ◽

Author(s):

Jiabao Cen ◽

Hao Jin ◽

Demiao Wang

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Temperature Coefficient ◽

Direct Current ◽

Positive Temperature Coefficient ◽

Positive Temperature ◽

Direct Current Magnetron Sputtering

Download Full-text