Diamond synthesis on Si by plasma chemical vapor deposition using microwave sheath-voltage combination plasma

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127592 ◽

2021 ◽

pp. 127592

Author(s):

Ippei Tanaka ◽

Hiroshi Okubo ◽

Yasunori Harada

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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The Effect of a Graphite Holder on Diamond Synthesis by Microwave Plasma Chemical Vapor Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2069256 ◽

1992 ◽

Vol 139 (2) ◽

pp. 558-560 ◽

Author(s):

M. C. Salvadori ◽

M. A. Brewer ◽

J. W. Ager ◽

K. M. Krishnan ◽

I. G. Brown

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Diamond synthesis by plasma chemical vapor deposition in liquid and gas

Diamond and Related Materials ◽

10.1016/j.diamond.2009.12.018 ◽

2010 ◽

Vol 19 (5-6) ◽

pp. 418-422 ◽

Author(s):

H. Toyota ◽

S. Nomura ◽

S. Mukasa ◽

Y. Takahashi ◽

S. Okuda

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Diamond synthesis via CH metal precursors processed in hot filament chemical vapor deposition and microwave plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(00)01327-4 ◽

2000 ◽

Vol 377-378 ◽

pp. 274-279 ◽

Author(s):

Ming-Show Wong ◽

Chung-An Lu ◽

Hsiao-Kho Chang ◽

Tien-Syh Yang ◽

Jane-How Wu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Metal Precursors ◽

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Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.4934751 ◽

2015 ◽

Vol 107 (18) ◽

pp. 181901 ◽

Author(s):

Kadek W. Hemawan ◽

Huiyang Gou ◽

Russell J. Hemley

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Diamond synthesis by microwave plasma chemical vapor deposition using graphite as the carbon source

Applied Physics Letters ◽

10.1063/1.106024 ◽

1991 ◽

Vol 59 (19) ◽

pp. 2386-2388 ◽

Author(s):

M. C. Salvadori ◽

J. W. Ager ◽

I. G. Brown ◽

K. M. Krishnan

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Source ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Diamond Synthesis by Microwave-Plasma Chemical Vapor Deposition Using CH3Cl and CH2Cl2as Carbon Source

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.5067 ◽

1993 ◽

Vol 32 (Part 1, No. 11A) ◽

pp. 5067-5071 ◽

Author(s):

Takayuki Nagano ◽

Noriyoshi Shibata

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Source ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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The role of hydrogen in diamond synthesis from carbon dioxide-hydrocarbon gases by microwave plasma chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(07)80050-8 ◽

1992 ◽

Vol 54-55 ◽

pp. 368-373 ◽

Author(s):

Chia-Fu Chen ◽

Tsao-Ming Hong

Keyword(s):

Carbon Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Hydrocarbon Gases ◽

Plasma Chemical Vapor Deposition

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The role of hydrogen in diamond synthesis from carbon dioxide–hydrocarbon gases by microwave plasma chemical vapor deposition

Metallurgical Coatings and Thin Films 1992 ◽

10.1016/b978-0-444-89900-2.50067-1 ◽

1992 ◽

pp. 368-373

Author(s):

Chia-Fu Chen ◽

Tsao-Ming Hong

Keyword(s):

Carbon Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Plasma Chemical ◽

Hydrocarbon Gases ◽

Plasma Chemical Vapor Deposition

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Simulation of diamond synthesis by microwave plasma chemical vapor deposition with multiple substrates in a substrate holder

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2021.126457 ◽

2021 ◽

pp. 126457

Author(s):

Lin Li ◽

Chengchun Zhao ◽

Shulong Zhang ◽

Qiaorui Gong ◽

Xiaohui Sun ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Synthesis ◽

Substrate Holder ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Multiple Substrates

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Remote hydrogen plasma chemical vapor deposition from alkylsilane and alkylcarbosilane single-sources: Mechanism of the process and properties of resulting silicon-carbon deposits

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:2001388 ◽

2001 ◽

Vol 11 (PR3) ◽

pp. Pr3-691-Pr3-702

Author(s):

A. M. Wrobel

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Hydrogen Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Carbon Deposits ◽

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