Optical, mechanical and etch properties of amorphous carbon nitride films grown by plasma enhanced chemical vapor deposition at room temperature
2010 ◽
Vol 160
(23-24)
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pp. 2442-2446
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1999 ◽
Vol 17
(5)
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pp. 2607-2611
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2002 ◽
Vol 41
(Part 1, No. 5A)
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pp. 3130-3136
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2010 ◽
Vol 49
(8)
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pp. 08JF07
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2012 ◽
Vol 51
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pp. 08HF04
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2001 ◽
Vol 394
(1-2)
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pp. 114-123
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2005 ◽
Vol 14
(3-7)
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pp. 975-982
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