Photoluminescence characteristics of ZnGa2O4−xMx:Mn2+ (M=S, Se) thin film phosphors grown by pulsed laser ablation

Pulsed-laser ablation has been widely used to produce high-quality thin films of YBa2Cu3O7-δ on a range of substrate materials. The nonequilibrium nature of the process allows congruent deposition of oxides with complex stoichiometrics. In the high power density regime produced by the UV excimer lasers the ablated species includes a mixture of neutral atoms, molecules and ions. All these species play an important role in thin-film deposition. However, changes in the deposition parameters have been shown to affect the microstructure of thin YBa2Cu3O7-δ films. The formation of metastable configurations is possible because at the low substrate temperatures used, only shortrange rearrangement on the substrate surface can occur. The parameters associated directly with the laser ablation process, those determining the nature of the process, e g. thermal or nonthermal volatilization, have been classified as ‘primary parameters'. Other parameters may also affect the microstructure of the thin film. In this paper, the effects of these ‘secondary parameters' on the microstructure of YBa2Cu3O7-δ films will be discussed. Examples of 'secondary parameters' include the substrate temperature and the oxygen partial pressure during deposition.

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Effects of deposition rate on Bi2Sr2CaCu2O8+x and Bi2Sr1.6La0.4CuO6+x epitaxial thin-film growth by pulsed-laser ablation

10.1063/1.44914 ◽

1993 ◽

Author(s):

Shen Zhu ◽

D. H. Lowndes ◽

B. C. Chakoumakos ◽

D. K. Christen ◽

J. D. Budai ◽

...

Keyword(s):

Thin Film ◽

Laser Ablation ◽

Deposition Rate ◽

Film Growth ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Thin Film Growth ◽

Epitaxial Thin Film ◽

Epitaxial Thin Film Growth

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TEM Study of the Effect of the Sapphire Substrate Surface Orientation on the Microstructure of Tin Dioxide Films

Microscopy and Microanalysis ◽

10.1017/s1431927600032177 ◽

2001 ◽

Vol 7 (S2) ◽

pp. 1220-1221

Author(s):

J. E. Dominguez ◽

L. Fu ◽

X. Q. Pan

Keyword(s):

Thin Film ◽

Laser Ablation ◽

High Performance ◽

Tin Dioxide ◽

Substrate Surface ◽

Sensor Arrays ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Oxide Thin Film ◽

Thin Film Sensors

Tin dioxide (SnO2) has been extensively studied and used as gas sensors to detect toxic gases such as CO, NOxand flammable gases like H2.[l] Recently, considerable researches have focused on thin film sensors due to their high performance as well as their integration compatibility with semiconductor technology for making microsensors and sensor arrays. [2] The performance of thin film sensors is remarkably influenced by the way they were fabricated.[3] Among various deposition techniques, pulsed laser deposition (PLD) has shown great prominence in the deposition of a wide variety of oxide thin film materials such as high Tc superconductors, semiconductors and dielectrics. in this work we present our experimental results on tin dioxide films deposited using pulsed laser ablation on sapphire (α -Al2O3) substrates with different surface orientations.Tin oxide films with a thickness of 100 nm were deposited on the (1012) and (0001) sapphire by pulsed laser ablation of ceramic SnO2 targets.

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