Silicon nitride at high deposition rate by Hot Wire Chemical Vapor Deposition as passivating and antireflection layer on multicrystalline silicon solar cells

2006 ◽  
Vol 501 (1-2) ◽  
pp. 51-54 ◽  
Author(s):  
C.H.M. van der Werf ◽  
H.D. Goldbach ◽  
J. Löffler ◽  
A. Scarfó ◽  
A.M.C. Kylner ◽  
...  
Keyword(s):  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Silicon Nitride ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Multicrystalline Silicon ◽  
Silicon Solar Cells ◽  
High Deposition Rate ◽  
Hot Wire

Silicon Nitride as Dielectric Medium Deposited at Ultra High Deposition Rate (>7 nm/s) using Hot-Wire Chemical Vapor Deposition

2007 ◽  
Vol 46 (3B) ◽  
pp. 1290-1294 ◽  
Author(s):  
Vasco Verlaan ◽  
Silvester Houweling ◽  
Karine van der Werf ◽  
Hanno D. Goldbach ◽  
Ruud E. I. Schropp
Keyword(s):  
Chemical Vapor Deposition ◽  
Silicon Nitride ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Dielectric Medium ◽  
High Deposition Rate ◽  
Hot Wire

In Situ-Doped Silicon Thin Films for Passivating Contacts by Hot-Wire Chemical Vapor Deposition with a High Deposition Rate of 42 nm/min

2019 ◽  
Vol 11 (33) ◽  
pp. 30493-30499 ◽  
Author(s):  
Shenghao Li ◽  
Manuel Pomaska ◽  
Jan Hoß ◽  
Jan Lossen ◽  
Mirko Ziegner ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
High Deposition Rate ◽  
Hot Wire ◽  
Silicon Thin Films ◽  
Doped Silicon

Epitaxial film silicon solar cells fabricated by hot wire chemical vapor deposition below 750°C

2009 ◽  
Author(s):  
Kirstin Alberi ◽  
Ina T. Marti ◽  
Maxim Shub ◽  
Charles W. Teplin ◽  
Eugene Iwaniczko ◽  
...  
Keyword(s):  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Epitaxial Film ◽  
Chemical Vapor ◽  
Silicon Solar Cells ◽  
Hot Wire

Simple and fast fabrication of a-Si:H/c-Si hetero-junction solar cells by dual-chamber hot wire chemical vapor deposition

2014 ◽  
Vol 68 ◽  
pp. 397-402 ◽  
Author(s):  
Dae Young Jeong ◽  
Kyungmin Kim ◽  
Hee-eun Song ◽  
Jinsoo Song ◽  
Seung Jae Baik ◽  
...  
Keyword(s):  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Dual Chamber
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