Optical properties of (Mn, Co) co-doped ZnO films prepared by dual-radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2006.04.030 ◽

2006 ◽

Vol 515 (4) ◽

pp. 2361-2365 ◽

Author(s):

Zheng-bin Gu ◽

Ming-hui Lu ◽

Jing Wang ◽

Chao-ling Du ◽

Chang-sheng Yuan ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

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Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.11.103 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3265-3268 ◽

Author(s):

C. Li ◽

M. Furuta ◽

T. Matsuda ◽

T. Hiramatsu ◽

H. Furuta ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

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Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Solar Energy ◽

10.1016/j.solener.2019.09.095 ◽

2019 ◽

Vol 194 ◽

pp. 471-477 ◽

Author(s):

Yanfeng Wang ◽

Jianmin Song ◽

Jie Zhang ◽

Guoxi Zheng ◽

Xiaochen Duan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

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Microstructural and optical properties of Ta-doped ZnO films prepared by radio frequency magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2016.03.214 ◽

2016 ◽

Vol 42 (9) ◽

pp. 10847-10853 ◽

Author(s):

Yongheng Wu ◽

Cuiping Li ◽

Mingji Li ◽

Hongji Li ◽

Sheng Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Realization of p-type Se–N co-doped ZnO films by radio-frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2013.07.008 ◽

2013 ◽

Vol 108 ◽

pp. 183-185 ◽

Author(s):

Hui Cai ◽

Hongbin Xu ◽

Zhizhen Ye ◽

Jingyun Huang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

P Type ◽

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Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering

Chinese Physics B ◽

10.1088/1674-1056/21/6/067306 ◽

2012 ◽

Vol 21 (6) ◽

pp. 067306 ◽

Author(s):

Shuang Liang ◽

Zeng-Xia Mei ◽

Xiao-Long Du

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

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Electrical and optical properties of TiO2-doped ZnO films prepared by radio-frequency magnetron sputtering

Journal of Physics and Chemistry of Solids ◽

10.1016/j.jpcs.2007.07.040 ◽

2008 ◽

Vol 69 (2-3) ◽

pp. 535-539 ◽

Author(s):

Jeng-Lin Chung ◽

Jyh-Chen Chen ◽

Chung-Jen Tseng

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

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The Electrical and Optical Properties of Al-Doped ZnO Films Sputtered in an Ar:H2Gas Radio Frequency Magnetron Sputtering System

Transactions on Electrical and Electronic Materials ◽

10.4313/teem.2010.11.2.081 ◽

2010 ◽

Vol 11 (2) ◽

pp. 81-84 ◽

Author(s):

Seung-Taek Hwang ◽

Choon-Bae Park

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Doped Zno ◽

Sputtering System

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Relation between surface and bulk electronic properties of Al doped ZnO films deposited at varying substrate temperature by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4923224 ◽

2015 ◽

Vol 117 (24) ◽

pp. 245312 ◽

Author(s):

C. C. Singh ◽

T. A. Patel ◽

E. Panda

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Electronic Properties ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Physical properties of Cu and Dy co-doped ZnO thin films prepared by radio frequency magnetron sputtering for hybrid organic/inorganic electronic devices

Thin Solid Films ◽

10.1016/j.tsf.2019.06.027 ◽

2019 ◽

Vol 685 ◽

pp. 379-384 ◽

Author(s):

C. Locovei ◽

D. Coman ◽

A. Radu ◽

L. Ion ◽

V.A. Antohe ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Physical Properties ◽

Electronic Devices ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

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Characteristics and luminescence of Ge doped ZnO films prepared by alternate radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2004.10.037 ◽

2005 ◽

Vol 245 (1-4) ◽

pp. 414-419 ◽

Author(s):

D.H. Fan ◽

Z.Y. Ning ◽

M.F. Jiang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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