Self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces fabricated using microwave-plasma chemical-vapor-deposition method

2010 ◽  
Vol 518 (21) ◽  
pp. S38-S41 ◽  
Author(s):  
Shota Iguchi ◽  
Osamu Maida ◽  
Toshimichi Ito
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