Nanocrystalline Diamond Films Deposited by the Hot Cathode Direct Current Plasma Chemical Vapor Deposition Method with Different Compositions of CH4/Ar/H2Gas Mixture

2008 ◽  
Vol 112 (5) ◽  
pp. 1401-1406 ◽  
Author(s):  
Leyong Zeng ◽  
Hongyan Peng ◽  
Weibiao Wang ◽  
Yuqiang Chen ◽  
Da Lei ◽  
...  
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