New approach to local anodic oxidation of semiconductor heterostructures

2008 ◽  
Vol 108 (10) ◽  
pp. 1086-1089 ◽  
Author(s):  
Jozef Martaus ◽  
Dagmar Gregušová ◽  
Vladimír Cambel ◽  
Robert Kúdela ◽  
Ján Šoltýs
Keyword(s):  
Anodic Oxidation ◽  
Semiconductor Heterostructures ◽  
New Approach ◽  
Local Anodic Oxidation

50-nm Local Anodic Oxidation Technology of Semiconductor Heterostructures

2010 ◽  
Vol 10 (7) ◽  
pp. 4448-4453
Author(s):  
Jozef Martaus ◽  
Vladimír Cambel ◽  
Dagmar Gregušová ◽  
Róbert Kúdela ◽  
Ján Fedor
Keyword(s):  
Anodic Oxidation ◽  
Semiconductor Heterostructures ◽  
Local Anodic Oxidation ◽  
Oxidation Technology

Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires

2015 ◽  
Vol 1109 ◽  
pp. 500-504
Author(s):  
J. Rouhi ◽  
Kevin Alvin Eswar ◽  
F.S. Husairi ◽  
Salman A.H. Alrokayan ◽  
Haseeb A. Khan ◽  
...  
Keyword(s):  
Anodic Oxidation ◽  
Numerical Optimization ◽  
Semiconductor Nanowires ◽  
Metal Nanowires ◽  
New Approach ◽  
Oxide Nanowires ◽  
Independent Variables ◽  
Functional Relationships ◽  
Local Anodic Oxidation ◽  
Central Composite

In this study, the response surface methodology was utilized to optimize width of linear oxide for fabrication of Si oxide nanowires using local anodic oxidation lithography. A collection of experiments was designed using central composite design to evaluate the results statistically. The functional relationships were studied between the ambient humidity, applied voltage and tip speed as independent variables. Furthermore, a new approach was indicated by using design of experiment (DOE) to determine the significant parameters that affects on dimensional characteristics of the linear oxide. Numerical optimization was prepared by the DOE software to obtain the optimal conditions of parameters in order to perform the requirements as desired. These results indicate that the technique has a great potential for the fabrication of individual metal and semiconductor nanowires.

scholarly journals Investigation of resistive switching in gallium oxide nanostructures formed by local anodic oxidation

2019 ◽  
Vol 1410 ◽  
pp. 012233 ◽  
Author(s):  
R V Tominov ◽  
N A Polupanov ◽  
V I Avilov ◽  
M S Solodovnik ◽  
N V Parshina ◽  
...  
Keyword(s):  
Anodic Oxidation ◽  
Resistive Switching ◽  
Gallium Oxide ◽  
Oxide Nanostructures ◽  
Local Anodic Oxidation

A study of the formation modes of nanosized oxide structures of gallium arsenide by local anodic oxidation

2012 ◽  
Vol 46 (13) ◽  
pp. 1616-1621 ◽  
Author(s):  
O. A. Ageev ◽  
V. A. Smirnov ◽  
M. S. Solodovnik ◽  
A. V. Rukomoikin ◽  
V. I. Avilov
Keyword(s):  
Gallium Arsenide ◽  
Anodic Oxidation ◽  
Local Anodic Oxidation ◽  
Nanosized Oxide

A Study of Nanoscale Profiling Modes of a Silicon Surface via Local Anodic Oxidation

2018 ◽  
Vol 13 (1-2) ◽  
pp. 84-89 ◽  
Author(s):  
V. V. Polyakova ◽  
V. A. Smirnov ◽  
O. A. Ageev
Keyword(s):  
Anodic Oxidation ◽  
Silicon Surface ◽  
Local Anodic Oxidation

Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation

2019 ◽  
Vol 549 (1) ◽  
pp. 70-77
Author(s):  
Xuewen Wang ◽  
Barayavuga Theogene ◽  
Huanhuan Mei ◽  
Jianwei Zhang ◽  
Chenchen Huang ◽  
...  
Keyword(s):  
Anodic Oxidation ◽  
Silicon Surface ◽  
Local Anodic Oxidation

Nanoscaled Profiling of Silicon Surface via Local Anodic Oxidation

2019 ◽  
Vol 48 (2) ◽  
pp. 66-71 ◽  
Author(s):  
V. V. Polyakova ◽  
I. N. Kots ◽  
V. A. Smirnov ◽  
O. A. Ageev
Keyword(s):  
Anodic Oxidation ◽  
Silicon Surface ◽  
Local Anodic Oxidation

Parallel-local anodic oxidation of silicon surfaces by soft stamps

2008 ◽  
Vol 19 (43) ◽  
pp. 435303 ◽  
Author(s):  
Cristiano Albonetti ◽  
Javier Martinez ◽  
Nuria S Losilla ◽  
Pierpaolo Greco ◽  
Massimiliano Cavallini ◽  
...  
Keyword(s):  
Anodic Oxidation ◽  
Silicon Surfaces ◽  
Local Anodic Oxidation
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