Strain mapping of LED devices by dark-field inline electron holography: Comparison between deterministic and iterative phase retrieval approaches

2013 ◽  
Vol 127 ◽  
pp. 119-125 ◽  
Author(s):  
Kyung Song ◽  
Ga-Young Shin ◽  
Jong Kyu Kim ◽  
Sang Ho Oh ◽  
Christoph T. Koch
Keyword(s):  
Phase Retrieval ◽  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping

Strain Mapping of 45 nm MOSFET by Dark-Field Inline Electron Holography

2010 ◽  
Vol 16 (S2) ◽  
pp. 592-593
Author(s):  
VB Özdöl ◽  
CT Koch ◽  
PA van Aken
Keyword(s):  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

scholarly journals Low-Dose Strain Mapping by Dark-Field Inline Electron Holography

2011 ◽  
Vol 17 (S2) ◽  
pp. 1228-1229
Author(s):  
V Özdöl ◽  
C Koch ◽  
P van Aken
Keyword(s):  
Low Dose ◽  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

scholarly journals Strain Mapping on Semiconductor Device by Dark Field Electron Holography

2010 ◽  
Vol 16 (S2) ◽  
pp. 590-591 ◽  
Author(s):  
YY Wang ◽  
J Li ◽  
J Bruley ◽  
A Domenicucci ◽  
D Cooper ◽  
...  
Keyword(s):  
Semiconductor Device ◽  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping ◽  
Field Electron ◽  
Dark Field Electron

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Strain mapping in a nanoscale-triangular SiGe pattern by dark-field electron holography with medium magnification mode

Microscopy ◽  
2016 ◽  
Vol 65 (6) ◽  
pp. 499-507 ◽  
Author(s):  
Van Vuong Hoang ◽  
Youngji Cho ◽  
Jung Ho Yoo ◽  
Soon-Ku Hong ◽  
Yong Ho Choi ◽  
...  
Keyword(s):  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping ◽  
Field Electron ◽  
Dark Field Electron

Dark-Field Electron Holography for Strain Mapping

2013 ◽  
pp. 81-106 ◽  
Author(s):  
Martin Hÿtch ◽  
Florent Houdellier ◽  
Nikolay Cherkashin ◽  
Shay ReboH ◽  
Elsa Javon ◽  
...  
Keyword(s):  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping ◽  
Field Electron ◽  
Dark Field Electron

scholarly journals Quantitative strain mapping of InAs/InP quantum dots with 1 nm spatial resolution using dark field electron holography

2011 ◽  
Vol 99 (26) ◽  
pp. 261911 ◽  
Author(s):  
David Cooper ◽  
Jean-Luc Rouviere ◽  
Armand Béché ◽  
Shima Kadkhodazadeh ◽  
Elizaveta S. Semenova ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Spatial Resolution ◽  
Dark Field ◽  
Electron Holography ◽  
Strain Mapping ◽  
Field Electron ◽  
Dark Field Electron ◽  
Inp Quantum Dots

A New Detector System For The HB5 Stem Instrument

1985 ◽  
Vol 43 ◽  
pp. 134-135
Author(s):  
J.M. Cowley
Keyword(s):  
Dark Field ◽  
Detector System ◽  
Electron Holography ◽  
Small Specimen ◽  
Bright Field ◽  
Multiple Images ◽  
Practical Applications ◽  
Wide Range ◽  
Diffraction Patterns ◽  
Operational Modes

The HB5 STEM instrument at ASU has been modified previously to include an efficient two-dimensional detector incorporating an optical analyser device and also a digital system for the recording of multiple images. The detector system was built to explore a wide range of possibilities including in-line electron holography, the observation and recording of diffraction patterns from very small specimen regions (having diameters as small as 3Å) and the formation of both bright field and dark field images by detection of various portions of the diffraction pattern. Experience in the use of this system has shown that sane of its capabilities are unique and valuable. For other purposes it appears that, while the principles of the operational modes may be verified, the practical applications are limited by the details of the initial design.

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