Microscopic investigations of morphology and thermal properties of ZnO thin films grown by atomic layer deposition method

Microscopic Investigations

Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method

Journal of the Korean Physical Society ◽

10.3938/jkps.50.1827 ◽

2007 ◽

Vol 50 (6) ◽

pp. 1827 ◽

Cited By ~ 22

Author(s):

G. X. Liu ◽

F. K. Shan ◽

W. J. Lee ◽

B. C. Shin

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Temperature Dependence ◽

Growth Temperature ◽

Atomic Layer ◽

Deposition Method ◽

Tio2 Thin Films ◽

Layer Deposition ◽

Growth Temperature Dependence

Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate

ECS Meeting Abstracts ◽

10.1149/ma2005-02/13/536 ◽

2005 ◽

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Si Substrate ◽

Remote Plasma ◽

Layer Deposition ◽

Fabrication and Properties of Vanadium Oxide Thin Films for Microbolometer by using Plasma Atomic Layer Deposition Method

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2008.21.2.156 ◽

2008 ◽

Vol 21 (2) ◽

pp. 156-161

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Vanadium Oxide ◽

Atomic Layer ◽

Deposition Method ◽

Oxide Thin Films ◽

Layer Deposition ◽

Vanadium Oxide Thin Films

Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate

ECS Transactions ◽

10.1149/1.2209296 ◽

2019 ◽

Vol 1 (5) ◽

pp. 459-464

Author(s):

Hyunseok Kang ◽

Seokhoon Kim ◽

Jinwoo Kim ◽

Jihoon Choi ◽

Hyeongtag Jeon ◽

...

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Si Substrate ◽

Remote Plasma ◽

Layer Deposition ◽

Characteristics of La$_2$O$_3$ Thin Films Deposited Using the ECR Atomic Layer Deposition Method

Journal of the Korean Physical Society ◽

10.3938/jkps.55.590 ◽

2009 ◽

Vol 55 (2) ◽

pp. 590-593 ◽

Cited By ~ 8

Author(s):

Woong-Sun Kim ◽

Sang-Kyun Park ◽

Dae-Yong Moon ◽

Byoung-Woo Kang ◽

Heon-Do Kim ◽

...

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Layer Deposition ◽

Deposition of c-axis oriented Ba ferrite thin films by atomic layer deposition method for high density magnetic recording media

Journal of the Magnetics Society of Japan ◽

10.3379/jmsjmag.21.s1_70 ◽

1997 ◽

Vol 21 (S_1_PMRS_96) ◽

pp. S1_70-73

Author(s):

H. Shimizu ◽

H. Shinozaki ◽

Y. Hoshi ◽

K. Kato ◽

F. Kaneko ◽

...

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Recording Media ◽

Deposition Method ◽

Magnetic Recording Media ◽

Layer Deposition ◽

Ferrite Thin Films ◽

High Density Magnetic Recording

Heterojunction interface passivation strategy for Cu(In1-x,Gax)Se2 solar cell with nano-level engineering of Zn-based buffer structure via atomic layer deposition method

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2021.111010 ◽

2021 ◽

Vol 224 ◽

pp. 111010 ◽

Cited By ~ 1

Author(s):

Sang Su Shin ◽

Kihwan Kim ◽

Jinsu Yoo ◽

Ji Hye Kim ◽

Seungkyu Ahn ◽

...

Keyword(s):

Solar Cell ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Layer Deposition ◽

Interface Passivation ◽

Buffer Structure

Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

Microscopy and Microanalysis ◽

10.1017/s1431927621009417 ◽

2021 ◽

Vol 27 (S1) ◽

pp. 2660-2662

Author(s):

David Elam ◽

Eduardo Ortega ◽

Andrey Chabanov ◽

Arturo Ponce

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Low Temperatures ◽

Atomic Layer ◽

Structural Defects ◽

Zno Thin Films ◽

Layer Deposition

Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l414 ◽

2003 ◽

Vol 42 (Part 2, No. 4B) ◽

pp. L414-L416 ◽

Cited By ~ 14

Author(s):

Ju Youn Kim ◽

Yangdo Kim ◽

Hyeongtag Jeon

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Remote Plasma ◽

Tin Films ◽

Layer Deposition ◽

Ytterbium-doped fibers fabricated with atomic layer deposition method

Optics Express ◽

10.1364/oe.20.025085 ◽

2012 ◽

Vol 20 (22) ◽

pp. 25085 ◽

Cited By ~ 32

Author(s):

Joan J. Montiel i Ponsoda ◽

Lars Norin ◽

Changgeng Ye ◽

Markus Bosund ◽

Mikko J. Söderlund ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Layer Deposition ◽

Doped Fibers