Abstract
Higher-order Lamb waves with quasi-zero surface displacement components are reported on (100)-cut GaAs propagating along the <110> direction where the total displacement at the surface of the plate is less than 10% of the maximum total displacement. The dispersion curves and the displacement component profiles show the reduction of total displacement at the surface of the plate starting when the phase velocities of the higher-order modes are crossing the shear bulk acoustic wave velocity to the value as low as 5%. Due to the concentration of acoustic energy inside the plate, the reported quasi-zero plate acoustic waves (QZ-PAW) further reduce the radiation of acoustic when the plate surface is in contact with liquid. The experimental results validate the occurrence of QZ-PAW with a reduction of viscous damping insertion loss compared to previously reported quasi-longitudinal Lamb waves (QL-LW). The results demonstrate the potential QZ-PAW mode for emerging applications such as dual-mode PAW sensors, PAW devices with integrated sensor and actuator, thin-film and ultra-high frequency (UHF) PAW sensors in highly viscous liquid media.
Integrated piezoelectric plate acoustic waves transducers
