scholarly journals Development of electrode structure for acoustic delay lines by using inject printing method

2019 ◽  
Vol 30 ◽  
pp. 07005
Author(s):  
Andrey Smirnov ◽  
Iren Kuznetsova ◽  
Vladimir Anisimkin ◽  
Vladimir Kolesov
Keyword(s):  
Coupling Coefficient ◽  
Acoustic Waves ◽  
Delay Lines ◽  
Electrode Structure ◽  
Mechanical Coupling ◽  
Structure Characteristics ◽  
Plate Acoustic Waves ◽  
Printing Method

The results concerning to study of possibility to produce electrode structure of acoustic delay lines by using inject printing method are presented. The investigation of morphologic and structure characteristics of electrode structure produced has been carried out. The possibility of excitation of plate acoustic waves characterized by high value of electro-mechanical coupling coefficient by such acoustic delay lines has been demonstrated.

A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity

2019 ◽  
Vol 13 (3) ◽  
pp. 5334-5346
Author(s):  
M. N. Nguyen ◽  
L. Q. Nguyen ◽  
H. M. Chu ◽  
H. N. Vu
Keyword(s):  
Degrees Of Freedom ◽  
Proof Mass ◽  
Vibration Modes ◽  
Electrode Structure ◽  
Element Analysis ◽  
Mechanical Coupling ◽  
Fully Differential ◽  
Mode Effects ◽  
The Finite Element Analysis ◽  
Cross Axis

In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.

Motion of microscopic grains in a periodic potential of plate acoustic waves

2003 ◽  
Vol 15 (43) ◽  
pp. 7201-7211 ◽  
Author(s):  
A M Gorb ◽  
A B Nadtochii ◽  
O A Korotchenkov
Keyword(s):  
Acoustic Waves ◽  
Periodic Potential ◽  
Plate Acoustic Waves

Piezoelectric Properties in Textured Ceramics of SrBi2Nb2O9

2006 ◽  
Vol 320 ◽  
pp. 15-18 ◽  
Author(s):  
Takuya Sawada ◽  
Hirozumi Ogawa ◽  
Masahiko Kimura ◽  
Kosuke Shiratsuyu ◽  
Akira Ando
Keyword(s):  
Resonant Frequency ◽  
Grain Growth ◽  
Coupling Coefficient ◽  
Remanent Polarization ◽  
Vibration Mode ◽  
Piezoelectric Properties ◽  
Templated Grain Growth ◽  
Orientation Degree ◽  
Mechanical Coupling ◽  
Textured Ceramics

A study has been done for the piezoelectric properties in texured ceramics of SrBi2Nb2O9 (SBN) fabricated by the templated grain growth (TGG) method. Remanent polarization along to the stacking direction increased with the orientation degrees. That corresponds to the increases in electro-mechanical coupling coefficient with orientation degree. The temperature coefficient of the resonant frequency (TCF) in thickness sheer vibration mode changed from negative to positive with increasing orientation degrees, and an excellent TCF of -0.4 ppm/°C was obtained for the specimen with an orientation degree of 76%.

scholarly journals Integrated piezoelectric plate acoustic waves transducers

2008 ◽  
Vol 44 (12) ◽  
pp. 776 ◽  
Author(s):  
K.-T. Wu ◽  
C.-K. Jen ◽  
M. Kobayashi
Keyword(s):  
Acoustic Waves ◽  
Piezoelectric Plate ◽  
Plate Acoustic Waves

scholarly journals Investigations of several langasite cuts by high temperature in situ characterizations of surface acoustic waves delay lines

2011 ◽  
Vol 25 ◽  
pp. 317-320 ◽  
Author(s):  
Gudrun Bruckner ◽  
Thierry Aubert ◽  
Jochen Bardong ◽  
David Eisele ◽  
Rene Fachberger ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Delay Lines

Higher-order Lamb waves with quasi-zero surface displacement components on a GaAs piezoelectric plate

2021 ◽  
Author(s):  
Muhammad Hamidullah ◽  
Céline Elie-Caille ◽  
Therese Leblois
Keyword(s):  
Acoustic Waves ◽  
Lamb Waves ◽  
Surface Displacement ◽  
Displacement Component ◽  
Higher Order ◽  
Acoustic Energy ◽  
Bulk Acoustic Wave ◽  
Integrated Sensor ◽  
Total Displacement ◽  
Plate Acoustic Waves

Abstract Higher-order Lamb waves with quasi-zero surface displacement components are reported on (100)-cut GaAs propagating along the <110> direction where the total displacement at the surface of the plate is less than 10% of the maximum total displacement. The dispersion curves and the displacement component profiles show the reduction of total displacement at the surface of the plate starting when the phase velocities of the higher-order modes are crossing the shear bulk acoustic wave velocity to the value as low as 5%. Due to the concentration of acoustic energy inside the plate, the reported quasi-zero plate acoustic waves (QZ-PAW) further reduce the radiation of acoustic when the plate surface is in contact with liquid. The experimental results validate the occurrence of QZ-PAW with a reduction of viscous damping insertion loss compared to previously reported quasi-longitudinal Lamb waves (QL-LW). The results demonstrate the potential QZ-PAW mode for emerging applications such as dual-mode PAW sensors, PAW devices with integrated sensor and actuator, thin-film and ultra-high frequency (UHF) PAW sensors in highly viscous liquid media.

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