Influence of deposition parameters in the fabrication of a large-area narrow band-pass filter of bandwidth on subnanometer scale

Vacuum ◽  
2004 ◽  
Vol 74 (3-4) ◽  
pp. 577-583 ◽  
Author(s):  
Cheng-Chung Lee ◽  
Sheng-Hui Chen
Author(s):  
Ki-Cheol Yoon ◽  
Hyunwook Lee ◽  
Dong-Ki Lee ◽  
Jong-Chul Lee

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