Surface modification and chemical sputtering of graphite induced by low-energy atomic and molecular deuterium ions

Vacuum ◽  
2008 ◽  
Vol 82 (11) ◽  
pp. 1285-1290 ◽  
Author(s):  
H. Zhang ◽  
F.W. Meyer ◽  
H.M. Meyer ◽  
M.J. Lance
Keyword(s):  
Surface Modification ◽  
Low Energy ◽  
Chemical Sputtering

Rapid formation of ultra-thin dielectrics by Si surface modification using a large area low energy electron beam

Vacuum ◽  
1990 ◽  
Vol 41 (4-6) ◽  
pp. 796-799 ◽  
Author(s):  
Y.C Du ◽  
H Wang ◽  
B.Z Li ◽  
D.C Sun ◽  
Z.Q Yu ◽  
...  
Keyword(s):  
Surface Modification ◽  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Large Area ◽  
Rapid Formation ◽  
Low Energy Electron ◽  
Thin Dielectrics

Nanostructure evolution and surface modification of tungsten exposed to low energy, high flux deuterium plasma

2017 ◽  
Vol 125 ◽  
pp. 473-478 ◽  
Author(s):  
Wangguo Guo ◽  
Long Cheng ◽  
Jun Wang ◽  
Qingwei Fu ◽  
Shaoyang Qin ◽  
...  
Keyword(s):  
Surface Modification ◽  
Low Energy ◽  
High Flux ◽  
Deuterium Plasma

Using fast atomic source and low-energy plasma ions for polymer surface modification

Vacuum ◽  
2006 ◽  
Vol 80 (6) ◽  
pp. 643-646 ◽  
Author(s):  
Marshal Dhayal ◽  
K. Awasthi ◽  
Y.K. Vijay ◽  
D.K. Avasthi
Keyword(s):  
Surface Modification ◽  
Polymer Surface ◽  
Low Energy ◽  
Plasma Ions ◽  
Polymer Surface Modification ◽  
Atomic Source
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