Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixture
Keyword(s):
Keyword(s):
2007 ◽
Vol 90
(1)
◽
pp. 95-106
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2010 ◽
Vol 49
(8)
◽
pp. 08JB01
◽
Keyword(s):
Reactive ion etching of Pb(Zr[sub x]Ti[sub 1−x])O[sub 3] thin films in an inductively coupled plasma
1998 ◽
Vol 16
(4)
◽
pp. 1894
◽
Keyword(s):
Keyword(s):
2021 ◽
Vol 10
(5)
◽
pp. 054006
2008 ◽
Vol 14
(3)
◽
pp. 297-302
◽
Keyword(s):