Structure of RF fields in a twin-chamber radio-frequency inductive plasma source placed in a weak external magnetic field

Vacuum ◽  
2020 ◽  
Vol 181 ◽  
pp. 109634
Author(s):  
A.K. Petrov ◽  
E.A. Kralkina ◽  
A.M. Nikonov ◽  
K.V. Vavilin ◽  
I.I. Zadiriev
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Radio Frequency ◽  
Plasma Source

Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source

2018 ◽  
Vol 44 (9) ◽  
pp. 878-881
Author(s):  
P. A. Nekliudova ◽  
E. A. Kralkina ◽  
K. V. Vavilin ◽  
I. I. Zadiriyev ◽  
A. M. Nikonov
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Plasma Source ◽  
Absorption Efficiency ◽  
Rf Power

Plasma parameters in a twin-chamber RF inductive plasma source, placed in a weak external magnetic field

Vacuum ◽  
2019 ◽  
Vol 169 ◽  
pp. 108927 ◽  
Author(s):  
A.K. Petrov ◽  
E.A. Kralkina ◽  
A.M. Nikonov ◽  
K.V. Vavilin ◽  
I.I. Zadiriev
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Plasma Source ◽  
Plasma Parameters

Self-consistent model of an inductive RF plasma source in an external magnetic field

2004 ◽  
Vol 30 (5) ◽  
pp. 398-412 ◽  
Author(s):  
A. F. Aleksandrov ◽  
G. É. Bugrov ◽  
K. V. Vavilin ◽  
I. F. Kerimova ◽  
S. G. Kondranin ◽  
...  
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Plasma Source ◽  
Rf Plasma ◽  
Consistent Model ◽  
Self Consistent

scholarly journals Physical processes in a low-power inductive plasma source in the presence of a weak magnetic field

2021 ◽  
pp. 38-43
Author(s):  
Phedor Ivandikov ◽  
Ilya Zadiriev ◽  
Elena Kralkina
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Magnetic Fields ◽  
Low Power ◽  
Weak Magnetic Field ◽  
Discharge Plasma ◽  
Plasma Source ◽  
Axial Component ◽  
Physical Processes ◽  
Power Coupling

Research into the influence of a weak external magnetic field (<150 G) on the efficiency of power coupling to plasma and on the structure of axial RF fields in plasma is presented. Power coupling to the discharge plasma as well as the structure of the axial component of RF magnetic fields are shown to depend on the external magnetic field’s magnitude in a nonmonotous manner.

The influence of an external magnetic field on a radio frequency excited CO2 laser

2004 ◽  
Vol 11 (8) ◽  
pp. 3904-3910 ◽  
Author(s):  
F. Sohbatzadeh ◽  
H. Tavassoli ◽  
H. Latifi
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Radio Frequency ◽  
Co2 Laser

Energy Distribution of Ions Incident on Radio-Frequency Biased Electrodes in External Magnetic Field

2010 ◽  
Vol 12 (1) ◽  
pp. 41-45 ◽  
Author(s):  
Zou Xiu ◽  
Feng Xiaobing ◽  
Qiu Minghui ◽  
Liu Jinyuan ◽  
Gong Ye
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Energy Distribution ◽  
Radio Frequency
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