Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field
2018 ◽
Vol 63
(4)
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pp. 374-380
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2007 ◽
Vol 40
(22)
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pp. 7008-7018
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Keyword(s):
Keyword(s):
1975 ◽
Vol 13
(2)
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pp. 335-348
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1996 ◽
Vol 67
(4)
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pp. 1502-1507
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