Planar magnetron discharge with confinement of injected electrons

Vacuum ◽  
2021 ◽  
pp. 110487
Author(s):  
M.V. Shandrikov ◽  
I.D. Artamonov ◽  
I.YuBakeev ◽  
A.S. Bugaev ◽  
E.M. Oks ◽  
...  
Keyword(s):  
Magnetron Discharge ◽  
Planar Magnetron

Inductively-Coupled-Plasma-Assisted Planar Magnetron Discharge for Enhanced Ionization of Sputtered Atoms

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4568-4571 ◽  
Author(s):  
Yuichi Setsuhara ◽  
Masayoshi Kamai ◽  
Shoji Miyake ◽  
Jindrich Musil
Keyword(s):  
Inductively Coupled Plasma ◽  
Magnetron Discharge ◽  
Inductively Coupled ◽  
Planar Magnetron

Theory on High-Vacuum Planar Magnetron Discharge

1997 ◽  
Vol 36 (Part 1, No. 2) ◽  
pp. 787-791 ◽  
Author(s):  
Tsutomu Miura ◽  
Tatsuo Asakaki
Keyword(s):  
High Vacuum ◽  
Magnetron Discharge ◽  
Planar Magnetron

scholarly journals Direct Measurement of Potential Distribution in Planar Magnetron Discharge by Probe Method.

Shinku ◽  
1995 ◽  
Vol 38 (10) ◽  
pp. 859-864 ◽  
Author(s):  
Tatsuo ASAMAKI ◽  
Tsutomu MIURA ◽  
Takahiro HENMI ◽  
Chiori KANEKO
Keyword(s):  
Direct Measurement ◽  
Potential Distribution ◽  
Probe Method ◽  
Magnetron Discharge ◽  
Planar Magnetron

scholarly journals Development of a High-Vacuum Planar Magnetron Discharge.

Shinku ◽  
1992 ◽  
Vol 35 (2) ◽  
pp. 70-75 ◽  
Author(s):  
Tatsuo ASAMAKI ◽  
Tsutomu MIURA ◽  
Gen NAKAMURA ◽  
Koichi HOTATE ◽  
Shingo YONAIYAMA ◽  
...  
Keyword(s):  
High Vacuum ◽  
Magnetron Discharge ◽  
Planar Magnetron

Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

2003 ◽  
Vol 21 (4) ◽  
pp. 1218-1224 ◽  
Author(s):  
G. Buyle ◽  
D. Depla ◽  
K. Eufinger ◽  
J. Haemers ◽  
R. De Gryse ◽  
...  
Keyword(s):  
Direct Current ◽  
Pressure Dependence ◽  
Simplified Model ◽  
Magnetron Discharge ◽  
Planar Magnetron

scholarly journals Low-pressure planar magnetron discharge for surface deposition and nanofabrication

2010 ◽  
Vol 17 (5) ◽  
pp. 053509 ◽  
Author(s):  
Oleg Baranov ◽  
Maxim Romanov ◽  
Matthias Wolter ◽  
Shailesh Kumar ◽  
Xiaoxia Zhong ◽  
...  
Keyword(s):  
Low Pressure ◽  
Magnetron Discharge ◽  
Surface Deposition ◽  
Planar Magnetron
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