Eddy current monitoring system and data reduction protocol for Czochralski silicon crystal growth

1988 ◽  
Vol 88 (1) ◽  
pp. 30-38 ◽  
Author(s):  
J.A. Stefani ◽  
J.K. Tien ◽  
K.S. Choe ◽  
J.P. Wallace
Keyword(s):  
Crystal Growth ◽  
Monitoring System ◽  
Eddy Current ◽  
Data Reduction ◽  
Silicon Crystal ◽  
Czochralski Silicon ◽  
Current Monitoring

Measurement of temperature gradient in Czochralski silicon crystal growth

2001 ◽  
Vol 229 (1-4) ◽  
pp. 6-10 ◽  
Author(s):  
Xinming Huang ◽  
Toshinori Taishi ◽  
Tiefeng Wang ◽  
Keigo Hoshikawa
Keyword(s):  
Crystal Growth ◽  
Temperature Gradient ◽  
Silicon Crystal ◽  
Czochralski Silicon

Investigation of nitrogen behaviors during Czochralski silicon crystal growth

2011 ◽  
Vol 318 (1) ◽  
pp. 178-182 ◽  
Author(s):  
Xuegong Yu ◽  
Deren Yang ◽  
Keigo Hoshikawa
Keyword(s):  
Crystal Growth ◽  
Silicon Crystal ◽  
Czochralski Silicon
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