Influence of deposition conditions on the microstructure and mechanical properties of Ti–Si–N films by DC reactive magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(02)00833-7 ◽

2002 ◽

Vol 420-421 ◽

pp. 360-365 ◽

Author(s):

Soo Hyun Kim ◽

Jong Kuk Kim ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

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Effect of SiC thickness on microstructure and mechanical properties of (AlCrTiZrV)N/SiC nano-multilayers film synthesized by reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.138724 ◽

2021 ◽

pp. 138724

Author(s):

Bohan Li ◽

Xun Ma ◽

Wei Li ◽

Qingqing Zhai ◽

Ping Liu ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties

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Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2011.03.062 ◽

2011 ◽

Vol 205 (19) ◽

pp. 4471-4479 ◽

Author(s):

Andrzej Czyżniewski ◽

Witold Gulbiński ◽

György Radnóczi ◽

Marianna Szerencsi ◽

Mieczysław Pancielejko

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties

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Effect of Bias Voltage on Microstructure and Mechanical Properties of Nanocrystalline TiN Films Deposited by Reactive Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.3361 ◽

2011 ◽

Vol 11 (2) ◽

pp. 1758-1761 ◽

Author(s):

Sung-Yong Chun

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Bias Voltage ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tin Films ◽

Microstructure And Mechanical Properties

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Microstructure and mechanical properties of vanadium carbide coatings synthesized by reactive magnetron sputtering

International Journal of Refractory Metals and Hard Materials ◽

10.1016/j.ijrmhm.2008.09.014 ◽

2009 ◽

Vol 27 (3) ◽

pp. 611-614 ◽

Author(s):

Xiaoyan Wu ◽

Guangze Li ◽

Yanghui Chen ◽

Geyang Li

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Vanadium Carbide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties ◽

Carbide Coatings

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The mechanical properties evaluation of the CrN coatings deposited by the pulsed DC reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.07.047 ◽

2006 ◽

Vol 200 (10) ◽

pp. 3330-3335 ◽

Author(s):

Jyh-Wei Lee ◽

Shih-Kang Tien ◽

Yu-Chu Kuo ◽

Chih-Ming Chen

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering ◽

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Influence of Si content on the microstructure and mechanical properties of VSiN films deposited by reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2016.05.030 ◽

2016 ◽

Vol 131 ◽

pp. 51-57 ◽

Author(s):

Junhua Xu ◽

Jian Chen ◽

Lihua Yu

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties ◽

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Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering

Materials Letters ◽

10.1016/s0167-577x(02)01106-0 ◽

2003 ◽

Vol 57 (13-14) ◽

pp. 1925-1933 ◽

Author(s):

Arshad Mahmood ◽

Nikifor Rakov ◽

Mufei Xiao

Keyword(s):

Optical Properties ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

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NbC-Ni coatings deposited by DC reactive magnetron sputtering: Effect of Ni content on mechanical properties, thermal stability and oxidation resistance

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2018.06.068 ◽

2018 ◽

Vol 349 ◽

pp. 1018-1031 ◽

Author(s):

L.B. Varela ◽

F. Fernandes ◽

A. Cavaleiro ◽

A.P. Tschiptschin

Keyword(s):

Mechanical Properties ◽

Thermal Stability ◽

Magnetron Sputtering ◽

Oxidation Resistance ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Effect of gas flow ratio on the microstructure and mechanical properties of boron phosphide films prepared by reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2011.08.067 ◽

2011 ◽

Vol 258 (1) ◽

pp. 356-360 ◽

Author(s):

Z.C. Jia ◽

J.Q. Zhu ◽

C.Z. Jiang ◽

W.X. Shen ◽

J.C. Han ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Gas Flow ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Boron Phosphide ◽

Microstructure And Mechanical Properties ◽

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Microstructure and mechanical properties of hafnium carbide coatings synthesized by reactive magnetron sputtering

Journal of Coatings Technology and Research ◽

10.1007/s11998-009-9225-x ◽

2009 ◽

Vol 7 (3) ◽

pp. 403-407 ◽

Author(s):

Guanqun Li ◽

Geyang Li

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Hafnium Carbide ◽

Microstructure And Mechanical Properties ◽

Carbide Coatings

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