Effect of gas flow ratio on the microstructure and mechanical properties of boron phosphide films prepared by reactive magnetron sputtering

2011 ◽  
Vol 258 (1) ◽  
pp. 356-360 ◽  
Author(s):  
Z.C. Jia ◽  
J.Q. Zhu ◽  
C.Z. Jiang ◽  
W.X. Shen ◽  
J.C. Han ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Gas Flow ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Flow Ratio ◽  
Boron Phosphide ◽  
Microstructure And Mechanical Properties ◽  
Gas Flow Ratio

Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

2011 ◽  
Vol 205 (19) ◽  
pp. 4471-4479 ◽  
Author(s):  
Andrzej Czyżniewski ◽  
Witold Gulbiński ◽  
György Radnóczi ◽  
Marianna Szerencsi ◽  
Mieczysław Pancielejko
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties
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