Micromachined silicon cantilever beams for thin-film stress measurement

1996 ◽  
Vol 287 (1-2) ◽  
pp. 214-219 ◽  
Author(s):  
G.F. Cardinale ◽  
D.G. Howitt ◽  
W.M. Clift ◽  
K.F. McCarty ◽  
D.L. Medlin ◽  
...  
Keyword(s):  
Thin Film ◽  
Stress Measurement ◽  
Film Stress ◽  
Cantilever Beams ◽  
Thin Film Stress ◽  
Silicon Cantilever

Thin film stress measurement by fiber optic strain gage

2006 ◽  
Vol 494 (1-2) ◽  
pp. 141-145 ◽  
Author(s):  
S.M.M. Quintero ◽  
W.G. Quirino ◽  
A.L.C. Triques ◽  
L.C.G. Valente ◽  
A.M.B. Braga ◽  
...  
Keyword(s):  
Thin Film ◽  
Strain Gage ◽  
Fiber Optic ◽  
Stress Measurement ◽  
Film Stress ◽  
Thin Film Stress

scholarly journals Self-contained in-vacuum in situ thin film stress measurement tool

2018 ◽  
Vol 89 (5) ◽  
pp. 053904 ◽  
Author(s):  
J. Reinink ◽  
R. W. E. van de Kruijs ◽  
F. Bijkerk
Keyword(s):  
Thin Film ◽  
Stress Measurement ◽  
Film Stress ◽  
Measurement Tool ◽  
Thin Film Stress

Analysis of thin film stress measurement techniques

1997 ◽  
Vol 301 (1-2) ◽  
pp. 45-54 ◽  
Author(s):  
S.G Malhotra ◽  
Z.U Rek ◽  
S.M Yalisove ◽  
J.C Bilello
Keyword(s):  
Thin Film ◽  
Stress Measurement ◽  
Measurement Techniques ◽  
Film Stress ◽  
Thin Film Stress

Thin Film Stress Measurement with a Tunneling Sensor

1998 ◽  
Vol 546 ◽  
Author(s):  
P. Zhang ◽  
R. P. Vinci ◽  
J. C. Bravman ◽  
T. W. Kenny
Keyword(s):  
Thin Film ◽  
Stress Measurement ◽  
Thin Film Deposition ◽  
In Situ Stress ◽  
Film Deposition ◽  
Film Stress ◽  
Stress Monitoring ◽  
Thin Film Stress ◽  
Basic Measurement ◽  
A New Technique

AbstractA new technique of measuring thin film stress with a tunneling sensor is presented. Basic measurement concepts, preliminary results on thin film stress measurement, and fabrication processes for the tunneling stress measurement sensor are described. The feasibility of implementing this technique for in-situ stress monitoring during thin film deposition demonstrated.

In-situ thin film stress measurement using high-stability portable holographic interferometer

1996 ◽  
Author(s):  
George E. Dovgalenko ◽  
M. S. Haque ◽  
Anatoli Kniazkov ◽  
Yuri I. Onischenko ◽  
Gregory J. Salamo ◽  
...  
Keyword(s):  
Thin Film ◽  
High Stability ◽  
Stress Measurement ◽  
Film Stress ◽  
Holographic Interferometer ◽  
Thin Film Stress
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