Apparatus for thin-film stress measurement with integrated four-point bending equipment: Performance and results on Cu films
2000 ◽
Vol 71
(12)
◽
pp. 4479
◽
Keyword(s):
Cu Films
◽
2007 ◽
Vol 253
(9)
◽
pp. 4289-4294
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 89
(5)
◽
pp. 053904
◽
Keyword(s):
2007 ◽
Vol 2007.6
(0)
◽
pp. _OS3-2-6-1-_OS3-2-6-5
Keyword(s):
Keyword(s):
1996 ◽
Vol 287
(1-2)
◽
pp. 214-219
◽
Keyword(s):
2004 ◽
Vol 27
(3)
◽
pp. 594-601
◽
Keyword(s):
2003 ◽
Vol 21
(2)
◽
pp. 454-460
◽