Low temperature plasma enhanced chemical vapour deposition boron nitride

1997 ◽  
Vol 308-309 ◽  
pp. 219-222 ◽  
Author(s):  
M.N.P Carreño ◽  
J.P Bottecchia ◽  
I Pereyra
Keyword(s):  
Low Temperature ◽  
Boron Nitride ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Temperature Plasma ◽  
Temperature Plasma

Low-temperature plasma enhanced chemical vapour deposition of carbon nanotubes

2004 ◽  
Vol 13 (4-8) ◽  
pp. 1171-1176 ◽  
Author(s):  
S. Hofmann ◽  
B. Kleinsorge ◽  
C. Ducati ◽  
A.C. Ferrari ◽  
J. Robertson
Keyword(s):  
Carbon Nanotubes ◽  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Temperature Plasma ◽  
Temperature Plasma

Low-temperature plasma-enhanced chemical vapour deposition of transfer-free graphene thin films

2015 ◽  
Vol 158 ◽  
pp. 436-438 ◽  
Author(s):  
Maisara Othman ◽  
Richard Ritikos ◽  
Syed Muhammad Hafiz ◽  
Noor Hamizah Khanis ◽  
Nur Maisarah Abdul Rashid ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Free Graphene

scholarly journals Self-organized graphene-like boron nitride containing nanoflakes on copper by low-temperature N2 + H2 plasma

RSC Advances ◽  
2016 ◽  
Vol 6 (90) ◽  
pp. 87607-87615 ◽  
Author(s):  
B. B. Wang ◽  
D. Gao ◽  
I. Levchenko ◽  
K. Ostrikov ◽  
M. Keidar ◽  
...  
Keyword(s):  
Low Temperature ◽  
Boron Nitride ◽  
Chemical Vapour Deposition ◽  
Efficient Method ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Self Organized ◽  
Reactive Gases ◽  
Hot Filament

A simple and efficient method for synthesizing complex graphene-inspired BNCO nanoflakes by plasma-enhanced hot filament chemical vapour deposition using B4C as a precursor and N2/H2 reactive gases is reported.

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