scholarly journals Low temperature wafer-scale synthesis of hexagonal boron nitride by microwave assisted surface wave plasma chemical vapour deposition

AIP Advances ◽  
2019 ◽  
Vol 9 (3) ◽  
pp. 035043 ◽  
Author(s):  
Rupesh Singh ◽  
Golap Kalita ◽  
Rakesh D. Mahyavanshi ◽  
Sudip Adhikari ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Surface Wave ◽  
Low Temperature ◽  
Boron Nitride ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Hexagonal Boron Nitride ◽  
Chemical Vapour ◽  
Plasma Chemical ◽  
Microwave Assisted ◽  
Plasma Chemical Vapour Deposition

Deposition of diamond and boron nitride films by plasma chemical vapour deposition

1995 ◽  
Vol 70 (2-3) ◽  
pp. 163-174 ◽  
Author(s):  
J.M. Albella ◽  
C. Gomez-Aleixandre ◽  
O. Sanchez-Garrido ◽  
L. Vazquez ◽  
J.M. Martinez-Duart
Keyword(s):  
Boron Nitride ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Boron Nitride Films

Low-temperature synthesis of vertically aligned graphene through microwave-assisted chemical vapour deposition

2021 ◽  
pp. 138801
Author(s):  
Justyna Kulczyk-Malecka ◽  
Isabella V.J. dos Santos, ◽  
Marine Betbeder ◽  
Samuel Rowley-Neale ◽  
Zhaohe Gao ◽  
...  
Keyword(s):  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Microwave Assisted ◽  
Vertically Aligned
Sign in / Sign up

Export Citation Format

Share Document