Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering

1998 ◽  
Vol 332 (1-2) ◽  
pp. 230-234 ◽  
Author(s):  
H. Lutz ◽  
M. Bruns ◽  
F. Link ◽  
H. Baumann
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Silicon Carbonitride

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zinc Stannate ◽  
Magnetron Sputter ◽  
Sputter Deposited

Preparation by radio-frequency magnetron co-sputtering and characterization of thin films of lanthanum–strontium ferromanganites

2005 ◽  
Vol 485 (1-2) ◽  
pp. 66-71 ◽  
Author(s):  
Marie Petitjean ◽  
Réal Roberge ◽  
Sylvio Savoie ◽  
Michel Gagné ◽  
Gilles Caboche ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Lanthanum Strontium

Characterization of Ferroelectric SrBi2Ta2 O 9 Thin Films Deposited by a Radio Frequency Magnetron Sputtering Technique

1997 ◽  
Vol 144 (8) ◽  
pp. 2855-2858 ◽  
Author(s):  
Sang‐Shik Park ◽  
Cheol‐Hoon Yang ◽  
Soon‐Gil Yoon ◽  
Jun‐Hyung Ahn ◽  
Ho‐Gi Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering
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