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Silicon nitride layers on gallium arsenide by low-energy ion beam sputtering
Vacuum
◽
10.1016/s0042-207x(80)80541-0
◽
1980
◽
Vol 30
(8-9)
◽
pp. 346
Keyword(s):
Gallium Arsenide
◽
Silicon Nitride
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Nitride Layers
Download Full-text
Related Documents
Cited By
References
Silicon nitride layers on gallium arsenide by low‐energy ion beam sputtering
Journal of Vacuum Science and Technology
◽
10.1116/1.569904
◽
1979
◽
Vol 16
(2)
◽
pp. 189-192
◽
Cited By ~ 10
Author(s):
L. E. Bradley
◽
J. R. Sites
Keyword(s):
Gallium Arsenide
◽
Silicon Nitride
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Nitride Layers
Download Full-text
Semi-quantitative in situ Auger analysis of silicon nitride layers deposited by reactive ion beam sputtering
Surface Science
◽
10.1016/0039-6028(85)90968-9
◽
1985
◽
Vol 162
(1-3)
◽
pp. 695-701
◽
Cited By ~ 11
Author(s):
A. Bosseboeuf
◽
D. Bouchier
Keyword(s):
Silicon Nitride
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Auger Analysis
◽
Beam Sputtering
◽
Nitride Layers
Download Full-text
Semi-quantitative in SITU Auger analysis of silicon nitride layers deposited by reactive ion beam sputtering
Surface Science Letters
◽
10.1016/0167-2584(85)90325-1
◽
1985
◽
Vol 162
(1-3)
◽
pp. A612
Author(s):
A. Bosseboeuf
◽
D. Bouchier
Keyword(s):
Silicon Nitride
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Auger Analysis
◽
Beam Sputtering
◽
Nitride Layers
Download Full-text
High fluence effect on Si ripple morphology developed by low energy ion beam sputtering
10.1063/1.4810246
◽
2013
◽
Cited By ~ 4
Author(s):
Debasree Chowdhury
◽
Debabrata Ghose
Keyword(s):
Ion Beam
◽
Low Energy
◽
High Fluence
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Topographical changes induced by low energy ion beam sputtering at oblique incidence
Radiation Effects
◽
10.1080/00337578308228185
◽
1983
◽
Vol 77
(3-4)
◽
pp. 177-193
◽
Cited By ~ 11
Author(s):
Ren Cong-xin
◽
Chen Guo-Ming
◽
Fu Xtn-Ding
◽
Yang Jie
◽
Fang Hong-Li
◽
...
Keyword(s):
Oblique Incidence
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
A reliable fabrication technique for very low resistance ohmic contacts to p-InGaAs using low energy Ar/sup +/ ion beam sputtering
[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials
◽
10.1109/iciprm.1991.147349
◽
2002
◽
Cited By ~ 1
Author(s):
G. Stareev
◽
A. Umbach
◽
F. Fidorra
◽
H. Roehle
Keyword(s):
Ohmic Contacts
◽
Ion Beam
◽
Low Energy
◽
Fabrication Technique
◽
Ion Beam Sputtering
◽
Low Resistance
◽
Beam Sputtering
Download Full-text
Properties of secondary particles for ion beam sputtering of silicon using low-energy oxygen ions
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/6.0000037
◽
2020
◽
Vol 38
(3)
◽
pp. 033011
◽
Cited By ~ 2
Author(s):
Kyunghwan Oh
◽
Dmitry Kalanov
◽
André Anders
◽
Carsten Bundesmann
Keyword(s):
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Oxygen Ions
◽
Secondary Particles
◽
Beam Sputtering
Download Full-text
Effects of bombardment on optical properties during the deposition of silicon nitride by reactive ion-beam sputtering
Applied Optics
◽
10.1364/ao.35.003620
◽
1996
◽
Vol 35
(19)
◽
pp. 3620
◽
Cited By ~ 30
Author(s):
M. F. Lambrinos
◽
R. Valizadeh
◽
J. S. Colligon
Keyword(s):
Optical Properties
◽
Silicon Nitride
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
A reliable fabrication technique for very low resistance ohmic contacts top-InGaAs using low energy Ar+ ion beam sputtering
Journal of Electronic Materials
◽
10.1007/bf03030207
◽
1991
◽
Vol 20
(12)
◽
pp. 1059-1063
◽
Cited By ~ 8
Author(s):
G. Stareev
◽
A. Umbach
Keyword(s):
Ohmic Contacts
◽
Ion Beam
◽
Low Energy
◽
Fabrication Technique
◽
Ion Beam Sputtering
◽
Low Resistance
◽
Beam Sputtering
Download Full-text
Surface morphology of molybdenum silicide films upon low-energy ion beam sputtering
Journal of Physics Condensed Matter
◽
10.1088/1361-648x/aac4f6
◽
2018
◽
Vol 30
(26)
◽
pp. 264003
◽
Cited By ~ 5
Author(s):
R Gago
◽
M Jaafar
◽
F J Palomares
Keyword(s):
Surface Morphology
◽
Ion Beam
◽
Low Energy
◽
Molybdenum Silicide
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
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