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Effects of bombardment on optical properties during the deposition of silicon nitride by reactive ion-beam sputtering
Applied Optics
◽
10.1364/ao.35.003620
◽
1996
◽
Vol 35
(19)
◽
pp. 3620
◽
Cited By ~ 30
Author(s):
M. F. Lambrinos
◽
R. Valizadeh
◽
J. S. Colligon
Keyword(s):
Optical Properties
◽
Silicon Nitride
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
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References
Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering
Thin Solid Films
◽
10.1016/j.tsf.2007.08.051
◽
2008
◽
Vol 516
(11)
◽
pp. 3582-3585
◽
Cited By ~ 4
Author(s):
S.G. Yoon
◽
S.M. Kang
◽
W.S. Jung
◽
S.-W. Kim
◽
D.H. Yoon
Keyword(s):
Thin Films
◽
Optical Properties
◽
Ion Beam
◽
Intrinsic Stress
◽
Ion Beam Sputtering
◽
Beam Voltage
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Aging effect of optical properties on SiO2films grown on Si substrates by ion beam sputtering
10.1117/12.975934
◽
2012
◽
Author(s):
Yiqin Ji
◽
Huasong Liu
◽
Yugang Jiang
◽
Dandan Liu
◽
Lishuan Wang
◽
...
Keyword(s):
Optical Properties
◽
Ion Beam
◽
Aging Effect
◽
Ion Beam Sputtering
◽
Si Substrates
◽
Beam Sputtering
Download Full-text
Effect of Thickness Affecting Optical Properties of Ge Thin Film Preparing by Ultra Vacuum Ion Beam Sputtering
Journal of the Chinese Chemical Society
◽
10.1002/jccs.201000174
◽
2010
◽
Vol 57
(5B)
◽
pp. 1197-1199
◽
Cited By ~ 2
Author(s):
Yen-Hsun Su
◽
Sheng-Lung Tu
◽
Ho-Tung Lin
◽
Chun-Chieh Huang
Keyword(s):
Thin Film
◽
Optical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Silicon nitride layers on gallium arsenide by low‐energy ion beam sputtering
Journal of Vacuum Science and Technology
◽
10.1116/1.569904
◽
1979
◽
Vol 16
(2)
◽
pp. 189-192
◽
Cited By ~ 10
Author(s):
L. E. Bradley
◽
J. R. Sites
Keyword(s):
Gallium Arsenide
◽
Silicon Nitride
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Nitride Layers
Download Full-text
Optical properties of TiNx produced by reactive evaporation and reactive ion-beam sputtering
Vacuum
◽
10.1016/0042-207x(83)90157-4
◽
1983
◽
Vol 33
(6)
◽
pp. 349
Keyword(s):
Optical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Reactive Evaporation
◽
Beam Sputtering
Download Full-text
Effect of oxygen flux on stress and optical properties of Ta2O5 using ion-beam sputtering
10.1117/12.2267493
◽
2017
◽
Author(s):
Qi Yu
◽
Jun-qi Fan
◽
Chun-lin Guan
Keyword(s):
Optical Properties
◽
Ion Beam
◽
Oxygen Flux
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Effect Of Oxygen
Download Full-text
Optical properties of dense thin‐film Si and Ge prepared by ion‐beam sputtering
Journal of Applied Physics
◽
10.1063/1.336172
◽
1985
◽
Vol 58
(2)
◽
pp. 954-957
◽
Cited By ~ 84
Author(s):
R. W. Collins
◽
H. Windischmann
◽
J. M. Cavese
◽
J. Gonzalez‐Hernandez
Keyword(s):
Thin Film
◽
Optical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Electrical and optical properties of amorphous hydrogenated silicon prepared by reactive ion beam sputtering
Journal of Applied Physics
◽
10.1063/1.334080
◽
1984
◽
Vol 56
(4)
◽
pp. 1097-1103
◽
Cited By ~ 7
Author(s):
Jagriti Singh
◽
R. C. Budhani
◽
K. L. Chopra
Keyword(s):
Optical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Electrical And Optical Properties
◽
Hydrogenated Silicon
◽
Amorphous Hydrogenated Silicon
◽
Beam Sputtering
Download Full-text
Optical Properties of TiO^2-SiO^2 Mixture Thin Films Produced by Ion-Beam Sputtering
Optical Interference Coatings
◽
10.1364/oic.2007.tua8
◽
2007
◽
Cited By ~ 1
Author(s):
Tatiana V. Amotchkina
◽
Detlev Ristau
◽
Marc Lappschies
◽
Marco Jupe
◽
Alexander V. Tikhonravov
◽
...
Keyword(s):
Thin Films
◽
Optical Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Electrical and optical properties of hydrogenated amorphous silicon‐germanium (a‐Si1−xGex: H) films prepared by reactive ion beam sputtering
Journal of Applied Physics
◽
10.1063/1.344243
◽
1989
◽
Vol 66
(6)
◽
pp. 2528-2537
◽
Cited By ~ 11
Author(s):
Mohan Krishan Bhan
◽
L. K. Malhotra
◽
Subhash C. Kashyap
Keyword(s):
Optical Properties
◽
Amorphous Silicon
◽
Silicon Germanium
◽
Ion Beam
◽
Hydrogenated Amorphous Silicon
◽
Ion Beam Sputtering
◽
Electrical And Optical Properties
◽
Beam Sputtering
◽
Amorphous Silicon Germanium
◽
Hydrogenated Amorphous
Download Full-text
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