FIBSIM – dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling

Author(s):  
W. Boxleitner ◽  
G. Hobler
2019 ◽  
Vol 1 (9) ◽  
pp. 3584-3596 ◽  
Author(s):  
Kyle T. Mahady ◽  
Shida Tan ◽  
Yuval Greenzweig ◽  
Amir Raveh ◽  
Philip D. Rack

Successful development of a Monte Carlo simulation that accurately emulates gas assisted nanoscale focused ion beam etching.


2016 ◽  
Vol 11 (1) ◽  
pp. 1600039 ◽  
Author(s):  
Dimitrios Meimaroglou ◽  
Prokopios Pladis ◽  
Costas Kiparissides

2021 ◽  
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Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  

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