Development of Ion Beam Monte Carlo Simulation and Analysis of Focused Ion Beam Processing

2012 ◽  
Vol 29 (4) ◽  
pp. 479-486 ◽  
Author(s):  
Heung-Bae Kim
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Focused Ion Beam ◽  
Ion Beam

scholarly journals Monte Carlo simulation of nanoscale material focused ion beam gas-assisted etching: Ga+ and Ne+ etching of SiO2 in the presence of a XeF2 precursor gas

2019 ◽  
Vol 1 (9) ◽  
pp. 3584-3596 ◽  
Author(s):  
Kyle T. Mahady ◽  
Shida Tan ◽  
Yuval Greenzweig ◽  
Amir Raveh ◽  
Philip D. Rack
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Successful Development ◽  
Nanoscale Material ◽  
Ion Beam Etching

Successful development of a Monte Carlo simulation that accurately emulates gas assisted nanoscale focused ion beam etching.

Monte Carlo simulation to evaluate the contamination in an energy modulated carbon ion beam for hadron therapy delivered by cyclotron

2008 ◽  
Vol 53 (21) ◽  
pp. 6045-6053 ◽  
Author(s):  
M Cristina Morone ◽  
Luciano Calabretta ◽  
Giacomo Cuttone ◽  
Francesca Fiorini
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Ion Beam ◽  
Carbon Ion ◽  
Hadron Therapy ◽  
Carbon Ion Beam

Ion beam synthesis of Co nanoparticles in SiO2: Monte Carlo simulation

2004 ◽  
Vol 216 ◽  
pp. 329-333 ◽  
Author(s):  
C. Cerruti ◽  
J.P. Stoquert ◽  
C. D’Orléans ◽  
C. Estournès ◽  
J.J. Grob ◽  
...  
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Ion Beam ◽  
Ion Beam Synthesis ◽  
Co Nanoparticles
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