Pulsed laser deposition of adherent hexagonal/cubic boron nitride layer systems at high growth rates

ABSTRACTWe present a microstructural study of boron nitride films grown by ion-assisted pulsed laser deposition. Fourier transform infra-red spectroscopy, electron energy loss spectroscopy, and electron diffraction measurements indicate that within the irradiated region of the substrate, the film consists of high fraction of cBN with a small amount of the turbostratic phase; outside of the irradiated region, only the turbostratic phase is detected. Conventional and high resolution electron microscopic observations of the boron nitride microstructure indicate that the cBN is in the form of twinned crystallites, up to 30 nm in diameter. We also observe particulates, formed by the laser pulse, that reduce the yield of cBN in the irradiated regions by shadowing local areas from the ion beam.

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Microstructure of cubic boron nitride thin films grown by ion‐assisted pulsed laser deposition

Journal of Applied Physics ◽

10.1063/1.357143 ◽

1994 ◽

Vol 76 (1) ◽

pp. 295-303 ◽

Cited By ~ 91

Author(s):

D. L. Medlin ◽

T. A. Friedmann ◽

P. B. Mirkarimi ◽

P. Rez ◽

M. J. Mills ◽

...

Keyword(s):

Thin Films ◽

Boron Nitride ◽

Pulsed Laser Deposition ◽

Cubic Boron Nitride ◽

Pulsed Laser ◽

Laser Deposition

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Pulsed laser deposition of hexagonal and cubic boron nitride films

Applied Physics A ◽

10.1007/s003390051521 ◽

1999 ◽

Vol 69 (7) ◽

pp. S749-S753 ◽

Cited By ~ 12

Author(s):

G. Reisse ◽

S. Weissmantel

Keyword(s):

Boron Nitride ◽

Pulsed Laser Deposition ◽

Cubic Boron Nitride ◽

Pulsed Laser ◽

Laser Deposition ◽

Boron Nitride Films

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Growth of cubic boron nitride thin films by a field-ionization source-assisted pulsed laser deposition

Thin Solid Films ◽

10.1016/0040-6090(96)80019-8 ◽

1995 ◽

Vol 266 (2) ◽

pp. 173-175 ◽

Cited By ~ 4

Author(s):

Huoping Xin ◽

Yiqing Chen ◽

Xiaohong Shi ◽

Huaping Xu ◽

Chenglu Lin ◽

...

Keyword(s):

Thin Films ◽

Boron Nitride ◽

Pulsed Laser Deposition ◽

Cubic Boron Nitride ◽

Pulsed Laser ◽

Laser Deposition ◽

Field Ionization ◽

Ionization Source

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Strong pinning at high growth rates in Rare Earth Barium Cuprate (REBCO) superconductor films grown with liquid-assisted processing (LAP) during pulsed laser deposition

Superconductor Science and Technology ◽

10.1088/1361-6668/abe18d ◽

2021 ◽

Author(s):

John Patrick Frederick Feighan ◽

May Hsim Lai ◽

A Kursumovic ◽

Di Zhang ◽

Haiyan Wang ◽

...

Keyword(s):

Rare Earth ◽

Pulsed Laser Deposition ◽

Growth Rates ◽

Pulsed Laser ◽

High Growth ◽

Laser Deposition ◽

Strong Pinning ◽

Superconductor Films

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A continuous composition spread approach towards monolithic, wavelength-selective multichannel UV-photo-detector arrays

MRS Proceedings ◽

10.1557/opl.2014.19 ◽

2014 ◽

Vol 1633 ◽

pp. 123-129 ◽

Cited By ~ 5

Author(s):

H. von Wenckstern ◽

Z. Zhang ◽

J. Lenzner ◽

F. Schmidt ◽

M. Grundmann

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Growth Rates ◽

Pulsed Laser ◽

High Growth ◽

Laser Deposition ◽

Multiple Targets ◽

Detector Arrays ◽

Material Systems ◽

New Material

ABSTRACTContinuous composition spread (CCS) methods have been very successfully used for exploiting and optimization of new material systems. Concerning sample growth by pulsed-laser deposition (PLD) approaches towards thin films with a CCS are involved, here movable masks for partial shadowing of the substrate and multiple targets are needed to obtain linearly varying changes of composition. Here we make use of an approach allowing deposition of thin films with CCS at high growth rates by using segmented PLD targets. We describe how this approach can be used to fabricate monolithic, wavelength-selective multichannel UV-photo-detector arrays.

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