A continuous composition spread approach towards monolithic, wavelength-selective multichannel UV-photo-detector arrays
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ABSTRACTContinuous composition spread (CCS) methods have been very successfully used for exploiting and optimization of new material systems. Concerning sample growth by pulsed-laser deposition (PLD) approaches towards thin films with a CCS are involved, here movable masks for partial shadowing of the substrate and multiple targets are needed to obtain linearly varying changes of composition. Here we make use of an approach allowing deposition of thin films with CCS at high growth rates by using segmented PLD targets. We describe how this approach can be used to fabricate monolithic, wavelength-selective multichannel UV-photo-detector arrays.
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2007 ◽
Vol 59
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pp. 670-673
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Pulsed laser deposition of adherent hexagonal/cubic boron nitride layer systems at high growth rates
2002 ◽
Vol 197-198
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pp. 331-337
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2001 ◽
Vol 10
(11)
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pp. 1973-1982
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2001 ◽
Vol 11
(PR11)
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pp. Pr11-65-Pr11-69
2001 ◽
Vol 11
(PR11)
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pp. Pr11-133-Pr11-137
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2008 ◽
Vol 23
(3)
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pp. 553-556
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2021 ◽
Vol 127
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pp. 105716