A high-voltage pulse generator for plasma immersion ion implantation applications

1999 ◽  
Vol 112 (1-3) ◽  
pp. 29-33 ◽  
Author(s):  
V.A. Spassov ◽  
M. Ueda ◽  
J. Barroso
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Voltage Pulse ◽  
Pulse Generator ◽  
High Voltage Pulse ◽  
High Voltage Pulse Generator ◽  
Voltage Pulse Generator ◽  
Plasma Immersion Ion Implantation

Development of 650 kV 2 ns high voltage pulse generator

2014 ◽  
Vol 26 (12) ◽  
pp. 120102
Author(s):  
梁川 Liang Chuan ◽  
王文川 Wang Wenchuan ◽  
周林 Zhou Lin ◽  
李名加 Li Mingjia ◽  
张建华 Zhang Jianhua
Keyword(s):  
High Voltage ◽  
Voltage Pulse ◽  
Pulse Generator ◽  
High Voltage Pulse ◽  
High Voltage Pulse Generator ◽  
Voltage Pulse Generator

A High-Voltage Pulse Generator With Continuously Variable Pulsewidth Based on a Modified PFN

2017 ◽  
Vol 45 (5) ◽  
pp. 849-858 ◽  
Author(s):  
Sadegh Mohsenzade ◽  
Mostafa Zarghany ◽  
Morteza Aghaei ◽  
Shahriyar Kaboli
Keyword(s):  
High Voltage ◽  
Voltage Pulse ◽  
Pulse Generator ◽  
High Voltage Pulse ◽  
High Voltage Pulse Generator ◽  
Voltage Pulse Generator
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