Low temperature deposition of SiC thin films on plastics as a hard coating by ECR plasma 1 Keiichiro Sano, Hiroaki Tamamaki, Masaya Nomura (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

JSAE Review ◽  
1997 ◽  
Vol 18 (2) ◽  
pp. 207
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
University Research ◽  
Hard Coating ◽  
Ecr Plasma ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Research Institute

Low Temperature Deposition of Ge Thin Films for Phase Change Memory

2019 ◽  
Vol 11 (7) ◽  
pp. 269-278 ◽  
Author(s):  
Tianniu Chen ◽  
Chongying Xu ◽  
William Hunks ◽  
Matthias Stender ◽  
Gregory T. Stauf ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Phase Change ◽  
Phase Change Memory ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Change Memory
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