9732649 Low-temperature deposition of SiC thin films on plastics as a hard coating by ECR plasma II Keiichiro Sano, Hiroaki Tamamaki, Masaya Nomura (Suzuki Motor Corporation), Toru Aoki, Yoshinori Hatanaka (Shizuoka University)

Temperature Deposition

Low temperature deposition of SiC thin films on plastics as a hard coating by ECR plasma 1 Keiichiro Sano, Hiroaki Tamamaki, Masaya Nomura (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

JSAE Review ◽

10.1016/s0389-4304(97)85161-2 ◽

1997 ◽

Vol 18 (2) ◽

pp. 207

Keyword(s):

Thin Films ◽

Low Temperature ◽

University Research ◽

Hard Coating ◽

Ecr Plasma ◽

Temperature Deposition ◽

Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/Oz-plasma 3 Hiroaki Tamamaki, Masaya Nomura, Keiichiro Sano (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

JSAE Review ◽

10.1016/s0389-4304(97)85165-x ◽

1997 ◽

Vol 18 (2) ◽

pp. 207

Keyword(s):

Thin Films ◽

Low Temperature ◽

University Research ◽

Hard Coating ◽

Temperature Deposition ◽

Low temperature deposition of Ba1-xSrxTiO3 thin films by ECR plasma-enhanced metalorganic chemical vapor deposition

Integrated Ferroelectrics ◽

10.1080/10584589808202076 ◽

1998 ◽

Vol 21 (1-4) ◽

pp. 355-366 ◽

Cited By ~ 3

Author(s):

S. R. Gilbert ◽

S. R. Summerfelt ◽

T. S. Moise ◽

J. M. Anthony

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Ecr Plasma ◽

Temperature Deposition ◽

Metalorganic Chemical

Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/OZ-plasma 2 Keiichiro Sano (Shizuoka University Graduate School-Suzuki Motor Corporation), Hiroaki Tamamaki, Masaya Nomura (Suzuki Motor Corporation), Sunil Wickramanayaka, Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

JSAE Review ◽

10.1016/s0389-4304(96)80618-7 ◽

1996 ◽

Vol 17 (4) ◽

pp. 448

Keyword(s):

Thin Films ◽

Low Temperature ◽

Graduate School ◽

University Research ◽

Hard Coating ◽

Temperature Deposition ◽

9539950 Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/O2-plasma 1 Keiichiro Sano (Shizuoka University Graduate School·Suzuki Motor Corporation), Shigekazu Hayashi, Masaya Nomura (Suzuki Motor Corporation), Sunil Wickramanayaka, Yoichiro Nakanishi, Yoshinóri Hatanaka (Shizuoka University Research Institute of Electronics)

JSAE Review ◽

10.1016/0389-4304(96)83292-9 ◽

1996 ◽

Vol 17 (1) ◽

pp. 94

Keyword(s):

Thin Films ◽

Low Temperature ◽

University Research ◽

Hard Coating ◽

Temperature Deposition ◽

O2 Plasma ◽

The effect of oxygen concentration on the low temperature deposition of TiO2 thin films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.075 ◽

2008 ◽

Vol 202 (10) ◽

pp. 2126-2131 ◽

Cited By ~ 50

Author(s):

H. Toku ◽

R.S. Pessoa ◽

H.S. Maciel ◽

M. Massi ◽

U.A. Mengui

Keyword(s):

Thin Films ◽

Low Temperature ◽

Oxygen Concentration ◽

Tio2 Thin Films ◽

Temperature Deposition ◽

Effect Of Oxygen

Low Temperature Deposition and Characterization of BN Thin Films

Protective Coatings and Thin Films ◽

10.1007/978-94-011-5644-8_27 ◽

1997 ◽

pp. 345-355

Author(s):

P. M. Ossi ◽

M. Elena ◽

A. Miotello

Keyword(s):

Thin Films ◽

Low Temperature ◽

Temperature Deposition

Ceramic Transactions Series - Morphotropic Phase Boundary Perovskites, High Strain Piezoelectrics, and Dielectric Ceramics ◽

Low Temperature Deposition of Bi4Ti3O12-Based Ferroelectric Thin Films Using Site Engineering Concept

10.1002/9781118380802.ch36 ◽

2012 ◽

pp. 407-415

Author(s):

Hiroshi Funakubo ◽

Tomohiro Sakai ◽

Takayuki Watanabe ◽

Takashi Kojima ◽

Minoru Osada ◽

...

Keyword(s):

Thin Films ◽

Low Temperature ◽

Ferroelectric Thin Films ◽

Temperature Deposition ◽

Engineering Concept

Low Temperature Deposition of Ge Thin Films for Phase Change Memory

ECS Transactions ◽

10.1149/1.2779090 ◽

2019 ◽

Vol 11 (7) ◽

pp. 269-278 ◽

Cited By ~ 10

Author(s):

Tianniu Chen ◽

Chongying Xu ◽

William Hunks ◽

Matthias Stender ◽

Gregory T. Stauf ◽

...

Keyword(s):

Thin Films ◽

Low Temperature ◽

Phase Change ◽

Phase Change Memory ◽

Temperature Deposition ◽

Change Memory

Low-temperature deposition of polycrystalline silicon thin films by hot-wire CVD

Solar Energy Materials and Solar Cells ◽

10.1016/s0927-0248(97)00110-4 ◽

1997 ◽

Vol 48 (1-4) ◽

pp. 269-277 ◽

Cited By ~ 20

Author(s):

J.K. Rath ◽

H. Meiling ◽

R.E.I. Schropp

Keyword(s):

Thin Films ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Hot Wire ◽

Silicon Thin Films ◽

Temperature Deposition