Micro-SXRF (Synchrotron X-ray Fluorescence) or micro-SRIXE (Synchrotron Radiation Induced X-ray Emission) is a microanalytical technique which combines the sensitivity of more conventional microchemical methods such as Secondary Ion Microscopy (SIMS) and μ-PIXE (Proton Induced X-ray Emission) with the non-destructive and quantitative character of X-ray fluorescence analysis. The detection limits attainable at current SXRF-facilities are situated in the ppm (and in favourable cases the sub-ppm) range. The sensitivity of SRIXE can be used advantageously in individual particle analysis. This type of analysis is used, e.g., for studying sources of athmospheric pollution. Analysis of standard NIST micro-spheres at the NSLS-SRIXE facility yielded minimum detection limits in the 1 to 100 ppm range for particle sizes of around 10 to 30 μm.An interesting approach to individual particle characterisation is by means of electron microprobe analysis (EPMA). By using the backscattered electron signals, in an automated fashion, particles can be easily located on a filter substrate and their size and shape determined.
Analysis of individual microscopic particles by means of synchrotron radiation induced x-ray micro fluorescence
