Knowledge based method for touch probe configuration in an automated inspection system

1998 ◽  
Vol 76 (1-3) ◽  
pp. 153-160 ◽  
Author(s):  
G. Moroni ◽  
W. Polini ◽  
Q. Semeraro
Keyword(s):  
Inspection System ◽  
Automated Inspection ◽  
Knowledge Based ◽  
Touch Probe

The Investigation of Fluorine Induced Novel Probe Marker Discoloration

2018 ◽  
Author(s):  
W.F. Hsieh ◽  
Henry Lin ◽  
Vincent Chen ◽  
Irene Ou ◽  
Y.S. Lou
Keyword(s):  
Electric Field ◽  
Dark Field ◽  
Inspection System ◽  
Automated Inspection ◽  
Stress Tests ◽  
Auger Analysis ◽  
Corrosion Film ◽  
Scan Data ◽  
Thickness Variations ◽  
One Year

Abstract This paper describes the investigation of donut-shaped probe marker discolorations found on Al bondpads. Based on SEM/EDS, TEM/EELS, and Auger analysis, the corrosion product is a combination of aluminum, fluorine, and oxygen, implying that the discolorations are due to the presence of fluorine. Highly accelerated stress tests simulating one year of storage in air resulted in no new or worsening discolorations in the affected chips. In order to identify the exact cause of the fluorine-induced corrosion, the authors developed an automated inspection system that scans an entire wafer, recording and quantifying image contrast and brightness variations associated with discolorations. Dark field TEM images reveal thickness variations of up to 5 nm in the corrosion film, and EELS line scan data show the corresponding compositional distributions. The findings indicate that fluorine-containing gases used in upstream processes leave residues behind that are driven in to the Al bondpads by probe-tip forces and activated by the electric field generated during CP testing. The knowledge acquired has proven helpful in managing the problem.

Automated inspection system for washings by a neural network

1994 ◽  
pp. 633-638
Author(s):  
T. Ioi ◽  
M. Matsunaga ◽  
K. Morishita ◽  
J. Shimazaki ◽  
Y. Tanaka ◽  
...  
Keyword(s):  
Neural Network ◽  
Inspection System ◽  
Automated Inspection

Knowledge-based inspection planning

1992 ◽  
Vol 6 (3) ◽  
pp. 149-162 ◽  
Author(s):  
Huaming Lee ◽  
Jon Sims Williams ◽  
James Tannock
Keyword(s):  
Planning System ◽  
Automated Inspection ◽  
Inspection Planning ◽  
Knowledge Based ◽  
Computer Aided ◽  
Computer Aided Inspection

Inspection planning is a process of reasoning about inspection activities. As a result, a sequence of inspection actions is formulated, which, when performed, will achieve the desired measurements. In manufacturing, automated inspection technologies, such as Computer-Aided Inspection (CAI) or Co-ordinate Measuring Machines (CMMs), will be facilitated by inspection planning. Inspection planning involves the following four aspects: representation of inspection features; process formalization; modeling of inspection activities; and, finally, plan synthesis. This paper discusses an approach to knowledge-based inspection planning. Accordingly, a prototype inspection planning system has been developed, which is also described in this paper.

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