Effect of the hydrogen on the intrinsic stress in hydrogenated amorphous carbon films deposited from an electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.122726 ◽

1998 ◽

Vol 73 (22) ◽

pp. 3226-3228 ◽

Author(s):

B. Racine ◽

M. Benlahsen ◽

K. Zellama ◽

P. Goudeau ◽

M. Zarrabian ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Intrinsic Stress ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-012-9355-2 ◽

2012 ◽

Vol 32 (2) ◽

pp. 231-248 ◽

Author(s):

Haruhiko Ito ◽

Katsuaki Koshimura ◽

Saori Onitsuka ◽

Kohtaro Okada ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Materials Science in Semiconductor Processing ◽

10.1016/s1369-8001(00)00097-4 ◽

2001 ◽

Vol 4 (1-3) ◽

pp. 213-215

Author(s):

O. Durand-Drouhin ◽

M. Lejeune ◽

R. Bouzerar ◽

M. Benlahsen

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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On the microstructural, optical and mechanical properties of hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00288-5 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 752-755 ◽

Author(s):

O. Durand-Drouhin ◽

A. Zeinert ◽

M. Benlahsen ◽

K. Zellama ◽

R. Kré ◽

...

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Optical And Mechanical Properties ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4983 ◽

1998 ◽

Vol 37 (Part 1, No. 9A) ◽

pp. 4983-4988 ◽

Author(s):

Hidetoshi Saitoh ◽

Tohru Inoue ◽

Shigeo Ohshio

Keyword(s):

Amorphous Carbon ◽

Solid Solubility ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Resonance Plasma

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Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma

International Journal of Refractory Metals and Hard Materials ◽

10.1016/j.ijrmhm.2005.07.004 ◽

2006 ◽

Vol 24 (1-2) ◽

pp. 39-48 ◽

Author(s):

F. Piazza

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Resonance Plasma

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Growth and bonding structure of hard hydrogenated amorphous carbon thin films deposited from an electron cyclotron resonance plasma

Journal of Applied Physics ◽

10.1063/1.1423786 ◽

2002 ◽

Vol 91 (2) ◽

pp. 867-873 ◽

Author(s):

O. Durand-Drouhin ◽

M. Lejeune ◽

M. Benlahsen

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Hydrogenated Amorphous Carbon ◽

Bonding Structure ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Hydrogenated amorphous carbon films deposited in an electron cyclotron resonance–chemical vapor deposition discharge reactor using acetylene

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00252-6 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 654-657 ◽

Author(s):

B.K. Kim ◽

T.A. Grotjohn

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous

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Structural and electronic properties of electron cyclotron resonance plasma deposited hydrogenated amorphous carbon and carbon nitride films

Journal of Applied Physics ◽

10.1063/1.1454226 ◽

2002 ◽

Vol 91 (7) ◽

pp. 4154-4162 ◽

Author(s):

C. Godet ◽

N. M. J. Conway ◽

J. E. Bourée ◽

K. Bouamra ◽

A. Grosman ◽

...

Keyword(s):

Electronic Properties ◽

Amorphous Carbon ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Structural And Electronic Properties ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00017-5 ◽

1999 ◽

Vol 8 (8-9) ◽

pp. 1732-1736 ◽

Author(s):

W.-C. Chan ◽

M.-K. Fung ◽

I. Bello ◽

C.-S. Lee ◽

S.-T. Lee

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Resonance Plasma

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On the hydrogen incorporation, intrinsic stress and thermal stability of hydrogenated amorphous carbon films deposited from an electron cyclotron resonance plasma

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(01)00482-3 ◽

2001 ◽

Vol 283 (1-3) ◽

pp. 47-55 ◽

Author(s):

M Benlahsen ◽

B Racine ◽

K Zellama ◽

G Turban

Keyword(s):

Thermal Stability ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Intrinsic Stress ◽

Hydrogen Incorporation ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Thermal Stability Of ◽

Resonance Plasma

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