The small-angle x-ray scattering (SAXS) technique was used to investigate inhomogeneities on the scale of 10 to 600 Å in acid-catalyzed titania–silica and zirconia–silica xerogels. SAXS of (TiO2)x(SiO2)1−x and (ZrO2)x(SiO2)1−x xerogels with x < 0.1, in which there was no phase separation, showed the presence of two types of inhomogeneity. For Q < 0.05 Å−1 there was a clear departure from Porod scattering which showed that xerogel powder particle surfaces were rough. For 0.1 < Q < 0.4 Å−1 there was a plateau feature corresponding to micropores within the silica-based network, and this feature changes with heat treatment. SAXS of xerogels with x > 0.3 showed the presence of phase-separated regions of metal oxide, which were initially amorphous and crystallized at higher temperatures. A (TiO2)0.18(SiO2)0.82 xerogel that was not initially phase separated became phase separated after heat treatment at 750 °C due to reduced solubility of Ti in the silica network.