Spatial resolution in electron energy loss scattering

Limits on the spatial resolution in electron energy loss scattering (EELS) can be classified in several different categories. First, we must consider probe-specimen interactions which are separate from the energy loss event. These produce spreading of the probe in the STEM case and intermixing of beams with different specimen paths in the TEM case. Second, the EELS event itself is dependent on details of the scattering physics. We identify two subcategories for describing this, based roughly on the amount of energy lost -- a) the low energy region including surface and bulk plasmons, and b) core excitations. Third, the statistical quality available for the measurement will degrade the resolution, particularly for core edges.