Hrem of metal/metal multilayer materials
1986 ◽
Vol 44
◽
pp. 404-405
Keyword(s):
X Ray
◽
Multilayered structures (MLS) containing thin (<10nm) metallic layers of W or Mo with C or Si are undergoing development for use as x-ray reflectors and other x-ray optical elements. The two metals used are sputtered or evaporated in alternate layers onto a crystalline Si substrate (eg. [2]). The x-ray reflectance properties of these materials have been extensively studied, but until recently only indirect structural evidence has been available to allow a correlation between reflectance and structure to be made. A JEM 4000EX ultra-high resolution electron microscope has been used in this study to image the MLS and provide direct structural information.
1992 ◽
Vol 97
(1)
◽
pp. 199-211
◽
1973 ◽
Vol 31
◽
pp. 486-487
1990 ◽
Vol 48
(1)
◽
pp. 532-533
1991 ◽
pp. 847-852