Secondary Ion Mass Spectrometry For The Year 2000 and Beyond: Are There Any Showstoppers?

The National Technology Roadmap of Semiconductors (NTRS) shows that future semiconductor processing will require the formation of junctions less than 30nm deep with gate lengths approaching, and becoming less than, 0.lum. Techniques must be available to measure these in-depth, as well as spatial, distributions.Secondary ion mass spectrometry (SIMS) has long been the technique of choice for measuring dopant profiles in semiconductors. The depth of the junctions formed has, up top now, always been sufficiently deep into the semiconductor that the effects of the analysis on the measured profile (i.e. atomic mixing) could be ignored for the most part. In addition, gate lengths have been sufficiently large that diffusion of LDD implants under the gate have not contributed significantly to short-channel effects. However, the relentless decrease in the required junction depths and gate lengths may mean that the situation may change in the near future.

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Applications of Time-OF-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100135149 ◽

1990 ◽

Vol 48 (2) ◽

pp. 308-309

Author(s):

Bruno Schueler ◽

Robert W. Odom

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Structural Information ◽

Time Of Flight ◽

Biological Tissues ◽

Polymer Surfaces ◽

Tof Sims ◽

Secondary Ions ◽

Ion Mass Spectrometry ◽

Secondary Ion

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) provides unique capabilities for elemental and molecular compositional analysis of a wide variety of surfaces. This relatively new technique is finding increasing applications in analyses concerned with determining the chemical composition of various polymer surfaces, identifying the composition of organic and inorganic residues on surfaces and the localization of molecular or structurally significant secondary ions signals from biological tissues. TOF-SIMS analyses are typically performed under low primary ion dose (static SIMS) conditions and hence the secondary ions formed often contain significant structural information.This paper will present an overview of current TOF-SIMS instrumentation with particular emphasis on the stigmatic imaging ion microscope developed in the authors’ laboratory. This discussion will be followed by a presentation of several useful applications of the technique for the characterization of polymer surfaces and biological tissues specimens. Particular attention in these applications will focus on how the analytical problem impacts the performance requirements of the mass spectrometer and vice-versa.

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COMPARISON OF SECONDARY ION MASS SPECTROMETRY (SIMS) WITH ELECTRON MICROPROBE ANALYSIS (EPMA) AND OTHER THIN FILM ANALYTICAL METHODS

Le Journal de Physique Colloques ◽

10.1051/jphyscol:1984225 ◽

1984 ◽

Vol 45 (C2) ◽

pp. C2-103-C2-113

Author(s):

H. W. Werner ◽

A. P. von Rosenstiel

Keyword(s):

Thin Film ◽

Mass Spectrometry ◽

Electron Microprobe ◽

Analytical Methods ◽

Microprobe Analysis ◽

Electron Microprobe Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Surface study of laser welded stainless steels using secondary ion mass spectrometry

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5058637 ◽

1993 ◽

Author(s):

Parwaiz A. A. Khan ◽

Anand J. Paul

Keyword(s):

Mass Spectrometry ◽

Stainless Steels ◽

Secondary Ion Mass Spectrometry ◽

Surface Study ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Secondary Ion Mass Spectrometry SIMS IV

10.1007/978-3-642-82256-8 ◽

1984 ◽

Cited By ~ 9

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Optics-Free Visualization of Proteins in Single Cells by Time of Flight-Secondary Ion Mass Spectrometry Coupled with Genetically Encoded Chemical Tags

10.26434/chemrxiv.12046125 ◽

2020 ◽

Author(s):

Feifei Jia ◽

Jie Wang ◽

Yanyan Zhang ◽

Qun Luo ◽

Luyu Qi ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Single Cells ◽

Time Of Flight ◽

E Coli ◽

Tof Sims ◽

Ion Mass Spectrometry ◽

Chemical Tags ◽

Secondary Ion

In situ visualization of proteins of interest at single cell level is attractive in cell biology, molecular biology and biomedicine, which usually involves photon, electron or X-ray based imaging methods. Herein, we report an optics-free strategy that images a specific protein in single cells by time of flight-secondary ion mass spectrometry (ToF-SIMS) following genetic incorporation of fluorine-containing unnatural amino acids as a chemical tag into the protein via genetic code expansion technique. The method was developed and validated by imaging GFP in E. coli and human HeLa cancer cells, and then utilized to visualize the distribution of chemotaxis protein CheA in E. coli cells and the interaction between high mobility group box 1 protein and cisplatin damaged DNA in HeLa cells. The present work highlights the power of ToF-SIMS imaging combined with genetically encoded chemical tags for in situ visualization of proteins of interest as well as the interactions between proteins and drugs or drug damaged DNA in single cells.

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