scholarly journals Advantages of Direct Detection and Electron Counting for Electron Energy Loss Spectroscopy Data Acquisition and the Quest of Extremely High-Energy Edges Using Eels

2017 ◽  
Vol 23 (S1) ◽  
pp. 60-61
Author(s):  
Paolo Longo ◽  
Jamie L. Hart ◽  
Andrew C. Lang ◽  
Ray D. Twesten ◽  
Mitra L. Taheri
Keyword(s):  
Energy Loss ◽  
Data Acquisition ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Direct Detection ◽  
High Energy ◽  
Spectroscopy Data ◽  
Electron Counting ◽  
Electron Energy Loss

scholarly journals The Performance of Electron Counting Direct Detection in Electron Energy Loss Spectroscopy

2019 ◽  
Vol 25 (S2) ◽  
pp. 586-587 ◽  
Author(s):  
Shaobo Cheng ◽  
Paolo Longo ◽  
Ray D. Twesten ◽  
Gianluigi A. Botton
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Direct Detection ◽  
Electron Counting ◽  
Electron Energy Loss

Thickness Measurement of Focused Ion Beam Thinned Silicon Crystals Using Convergent Beam.Electron Diffraction and Electron Energy Loss Spectroscopy.

1999 ◽  
Vol 5 (S2) ◽  
pp. 898-899
Author(s):  
D. Delille ◽  
R. Pantel ◽  
G. Auvert ◽  
E. Van Cappellen
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Energy ◽  
Thickness Measurement ◽  
Crystal Thickness ◽  
Ion Milling ◽  
Electron Energy Loss

1. IntroductionThe FIB (focused ion beam) is now widely accepted as the most site-specific TEM preparation tool and as such proves to be highly valuable when analysing ULSI devices. However, using high-energy Gallium ions for milling induces amorphization of the crystal surfaces. A method able to quantify this surface alteration on silicon using a combination of CBED (convergent beam electron diffraction) and EELS (electron energy loss spectroscopy) is presented. CBED is a powerful tool that also can generate an accurate measure of crystal thickness. EELS can yield the total sample thickness, so from the difference the combined amorphous layers can be assessed. Two sets of application results are presented: the first one is obtained on a FIB thinned sample using an ion energy of 50 keV and the second set of results confirms the validity of the proposed method on a mechanically polished specimen with no subsequent ion milling.

Improved control and data‐acquisition electronics for high‐resolution electron energy loss spectroscopy

1996 ◽  
Vol 67 (3) ◽  
pp. 710-714
Author(s):  
Jun Xie ◽  
Youqi Wang ◽  
William J. Mitchell ◽  
Anthony Felino ◽  
Matthias Schick ◽  
...  
Keyword(s):  
High Resolution ◽  
Energy Loss ◽  
Data Acquisition ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Resolution Electron ◽  
Electron Energy Loss
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