Development of a 200kV Atomic Resolution Analytical Electron Microscope
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Few electron optical inventions have revolutionized the TEM/ STEM as profoundly as the spherical aberration (Cs) corrector has. Characterization of technologically important materials increasingly needs to be done at the atomic or even sub-atomic level. This characterization includes determination of atomic structure as well as structural chemistry. With Cs correctors, the sub-Angstrom imaging barrier has been passed, and fast atomic scale spectroscopy is possible. In addition to improvements in resolution, Cs correctors offer a number of other significant improvements and benefits.
1992 ◽
Vol 50
(1)
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pp. 74-75
2016 ◽
Vol 2
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1984 ◽
Vol 133
(3)
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pp. 255-274
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2006 ◽
Vol 12
(S02)
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pp. 534-535
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1989 ◽
Vol 11
(1)
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pp. 41-61
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