Matrix-Enhanced Secondary Ion Mass Spectrometry (ME SIMS) Using Room Temperature Ionic Liquid Matrices

2010 ◽  
Vol 82 (11) ◽  
pp. 4413-4419 ◽  
Author(s):  
Jennifer J. D. Fitzgerald ◽  
Paul Kunnath ◽  
Amy V. Walker
Keyword(s):  
Mass Spectrometry ◽  
Ionic Liquid ◽  
Room Temperature ◽  
Secondary Ion Mass Spectrometry ◽  
Room Temperature Ionic Liquid ◽  
Liquid Matrices ◽  
Ionic Liquid Matrices ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Radiation-Induced Segregation of Metals At Moving SiO2-Amorphous Si Interfaces

1996 ◽  
Vol 439 ◽  
Author(s):  
J. S. Williams ◽  
M. Petravic ◽  
M. Conway ◽  
K. T. Short
Keyword(s):  
Mass Spectrometry ◽  
Room Temperature ◽  
Secondary Ion Mass Spectrometry ◽  
Rutherford Backscattering ◽  
Assisted Migration ◽  
Ion Mass Spectrometry ◽  
Radiation Induced ◽  
Amorphous Si ◽  
Secondary Ion

AbstractSecondary ion mass spectrometry and Rutherford backscattering/channeling analysis have been used to study the segregation of Au at moving Si-SiO2 interfaces during bombardment of Si with 15 keV O- ions. Essentially 100% of the Au is found to segregate at a bombardment temperature of 250°C, whereas only partial segregation occurs for room temperature bombardment. Up to 10 monolayers of Au can be segregated in disordered Si behind an SiO2 layer at 250°C. These results are discussed in terms of ion-assisted migration of Au in disordered Si and extremely low solubilities of Au in SiO2.

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