Evaluation of a cesium positive ion source for secondary ion mass spectrometry

1977 ◽  
Vol 49 (13) ◽  
pp. 2023-2030 ◽  
Author(s):  
H. A. Storms ◽  
K. F. Brown ◽  
J. D. Stein
1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.


2007 ◽  
Vol 78 (8) ◽  
pp. 085101 ◽  
Author(s):  
S. F. Belykh ◽  
V. V. Palitsin ◽  
I. V. Veryovkin ◽  
A. P. Kovarsky ◽  
R. J. H. Chang ◽  
...  

1994 ◽  
Vol 65 (7) ◽  
pp. 2276-2280 ◽  
Author(s):  
Kaoru Umemura ◽  
Hiroyasu Shichi ◽  
Setsuo Nomura

1991 ◽  
Vol 63 (15) ◽  
pp. 1658-1660 ◽  
Author(s):  
Damon I. Papac ◽  
Kevin L. Schey ◽  
Daniel R. Knapp

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