scholarly journals New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

2007 ◽  
Vol 78 (8) ◽  
pp. 085101 ◽  
Author(s):  
S. F. Belykh ◽  
V. V. Palitsin ◽  
I. V. Veryovkin ◽  
A. P. Kovarsky ◽  
R. J. H. Chang ◽  
...  
1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.


1994 ◽  
Vol 65 (7) ◽  
pp. 2276-2280 ◽  
Author(s):  
Kaoru Umemura ◽  
Hiroyasu Shichi ◽  
Setsuo Nomura

1989 ◽  
Vol 111 (15) ◽  
pp. 5577-5583 ◽  
Author(s):  
Owen W. Hand ◽  
Lisa D. Detter ◽  
Stephen A. Lammert ◽  
R. Graham Cooks ◽  
Richard A. Walton

Sign in / Sign up

Export Citation Format

Share Document